2019
DOI: 10.1364/oe.27.020516
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Plasmon-enhanced Ge-based metal-semiconductor-metal photodetector at near-IR wavelengths

Abstract: We demonstrate the use of plasmonic effects to boost the near-infrared sensitivity of metal-semiconductor-metal detectors. Plasmon-enhanced photodetection is achieved by properly optimizing Au interdigitated electrodes, micro-fabricated on Ge, a semiconductor that features a strong near IR absorption. Finite-difference time-domain simulations, photocurrent experiments and Fourier-transform IR spectroscopy are performed to validate how a relatively simple tuning of the contact geometry allows for an enhancement… Show more

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Cited by 19 publications
(4 citation statements)
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“…where is the change in potential at the Au NPs/Ge interface and V n is the difference between the Fermi level and the conduction band minimum of the semiconductor (i.e., V n = 0.335 V for intrinsic Ge). We take to be 0.335 − 0.59 = −0.255 V because the barrier height at the Au/Ge interface is 0.59 V [25]- [27]. Pronounced band bending appeared below the Au NPs, and an approximately 200-nm-depth depletion region on the Ge side is observed.…”
Section: Resultsmentioning
confidence: 99%
“…where is the change in potential at the Au NPs/Ge interface and V n is the difference between the Fermi level and the conduction band minimum of the semiconductor (i.e., V n = 0.335 V for intrinsic Ge). We take to be 0.335 − 0.59 = −0.255 V because the barrier height at the Au/Ge interface is 0.59 V [25]- [27]. Pronounced band bending appeared below the Au NPs, and an approximately 200-nm-depth depletion region on the Ge side is observed.…”
Section: Resultsmentioning
confidence: 99%
“…This is a typical procedure to reduce the threading dislocation density from 10 9 to 10 7 cm −2 [20]. Preferential etching techniques are used to estimate the threading dislocation density in the Ge thick film, using a solution of 10 mL HF (50% vol) + 15 mL HNO 3 (69% vol) + 1 mg KI + 1 mg I 2 + 5 mL CH 3 COOH (100%vol) + 60 mL H 2 O at 0 • C temperature for 30 s [21,22]. Counting statistics is performed on Ge etched surfaces imaged by atomic force microscopy (AFM).…”
Section: Methodsmentioning
confidence: 99%
“…Thus, it has been demonstrated that redesigning electrodes as an optical antenna can enhance the sensitivity of a photodetector [12] and in the case of Ge, efficiently increase light absorption [11]. Further, well-designed plasmonic metal gratings offer the possibility of polarization-resolved photodetection [13,14]. However, from the application perspective both, detection performance and fabrication issues have to be considered.…”
Section: Introductionmentioning
confidence: 99%