Plasma sheath physics and dose uniformity in enhanced glow discharge plasma immersion ion implantation and deposition

Abstract

Articles you may be interested inImproved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon Rev. Sci. Instrum. 85, 063506 (2014); 10.1063/1.4875982 Theoretical investigation of sheath expansion and implant fluence uniformity in enhanced glow discharge plasma immersion ion implantation Appl. Phys. Lett. 93, 091501 (2008); 10.1063/1.2977962Numerical simulation of metal plasma-immersion ion implantation and deposition on a cone Simulation of sheath dynamics and current nonuniformity in plasma-immersion ion implantation of a patterned surface Based on the multiple-grid particle-in-cell code, an advanced simulation model is established to study the sheath physics and dose uniformity along the sample stage in order to provide the theoretical basis for further improvement of enhanced glow discharge plasma immersion ion implantation and deposition. At t = 7.0 s, the expansion of the sheath in the horizontal direction is hindered by the dielectric cage. The electron focusing effect is demonstrated by this model. Most of the ions at the inside wall of the cage are implanted into the edge of the sample stage and a relatively uniform ion fluence distribution with a large peak is observed at the end. Compared to the results obtained from the previous model, a higher implant fluence and larger area of uniformity are disclosed.

Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube

“…Furthermore, based on theoretical simulation and experimental data, the distribution of the implanted fluence is more uniform over a large area. [11][12][13] Hence, EGD-PIII is a potential alternative in commercial applications such as the production of silicon-on-insulator substrates. However, we have discovered from our experiments that the discharge and implantation effects when using hydrogen and helium plasmas are not as good as those observed from nitrogen and argon plasmas.…”