Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube

Xu, Yi; Li, Liuhe; Luo, Sida; Gu, Jiabin; Lei, Ning; Huo, Chunqin

doi:10.1016/j.apsusc.2016.10.049

Cited by 19 publications

(6 citation statements)

References 32 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…methods year, author and reference tube size and material film material and thickness PVD 1992, J. A. Sheward [5] Ø120 mm, steel Cr-Nb, 7 -17 mm 2016, D. Kottfer [7] Ø200 -300 mm, steel Ti, 1.3 -3.9 mm CVD 1986, H. Itoh [10] Ø10 mm, steel TiN, 12 mm 2013, H. Kousaka [9] Ø4.4 mm, steel DLC, 529 nm 2014, R. Hatada [11] Ø25 mm, steel Ag-DLC, 150 nm 2017, Y. Xu [8] Ø0.9 mm, glass and lucalox DLC,electroplating 2014, L. D. Sun [13] Ø9 mm, Ti TiO 2 , 5-15 mm 2017, C. J. Xiang [12] Ø10 mm, Ti TiO 2 , 0. 3 g), stirred at 58C for 10 min to ensure complete complexing, and then stirred at room temperature for 1 h to ensure a full chemical reaction.…”

Section: Methodsmentioning

confidence: 99%

“…At present, the technologies of coating an inner surface of the tube generally adopt physical vapour deposition (PVD) [ 5 – 7 ], chemical vapour deposition (CVD) [ 8 – 11 ], electroplating [ 12 , 13 ], electrical explosion [ 14 , 15 ] and dip-coating [ 16 – 18 ]. They are summarized in table 1 for the comparisons of processes and sizes of the films.…”

Section: Introductionmentioning

confidence: 99%

“… methods year, author and reference tube size and material film material and thickness PVD 1992, J. A. Sheward [ 5 ] Ø120 mm, steel Cr-Nb, 7–17 µm 2016, D. Kottfer [ 7 ] Ø200–300 mm, steel Ti, 1.3–3.9 µm CVD 1986, H. Itoh [ 10 ] Ø10 mm, steel TiN, 12 µm 2013, H. Kousaka [ 9 ] Ø4.4 mm, steel DLC, 529 nm 2014, R. Hatada [ 11 ] Ø25 mm, steel Ag-DLC, 150 nm 2017, Y. Xu [ 8 ] Ø0.9 mm, glass and lucalox DLC, -- electroplating 2014, L. D. Sun [ 13 ] Ø9 mm, Ti TiO 2 , 5–15 µm 2017, C. J. Xiang [ 12 ] Ø10 mm, Ti TiO 2 , 0.1–1 µm electrical explosion 2000, O. Demokan [ 15 ] Ø13 mm, Ta Al, 7.1–8.1 µm dip-coating 2007, W. C. Gu [ 17 ] Ø50 mm, steel ceramic, 300 µm 2018, S. Ayata [ 18 ] Ø16 mm, Al-Cu-Mg ZrO 2 -DLC, 182 nm …”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Hypergravity-assisted chemical liquid deposition of nano-granular film on the inner surface of a quartz tube

Shen

et al. 2018

R. Soc. open sci.

View full text Add to dashboard Cite

Transparent tubes with functions of heating and temperature measurement are badly required in the visualization investigation of two-phase flows and flow-boiling heat transfer. In order to prepare such a tube, we introduced a cost-effective and energy-efficient procedure of hypergravity-assisted chemical liquid deposition (HACLD) to produce transparent and conductive silver (Ag) films on the inner surfaces of quartz tubes, typically 50 mm in length and 8 mm in inner diameter with a set-up that was designed and built for this purpose. Precursors of organometallic Ag precursor solutions were prepared by dissolving silver citrate and 1,2-diaminopropane in 2-methoxyethanol with required concentration for the chemical liquid deposition process. Semitransparent and conductive Ag films formed inside the required quartz tubes under specific heating process in hypergravity. One of the films was about 47 nm in thickness, 23 Ω per square sheet resistance, and 30% optical transmittance. This attempt may pave a way for the understanding of the film forming mechanism in hypergravity, and the development of a film preparation technology of HACLD.

show abstract

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Hypergravity-assisted chemical liquid deposition of nano-granular film on the inner surface of a quartz tube

Shen

et al. 2018

R. Soc. open sci.

View full text Add to dashboard Cite

show abstract

“…This method is based on the specific feature of the hollow cathode that is usually electrically powered, thus representing a cathode, in which the electrons follow a 'pendulum' movement giving rise to multiple inelastic collisions leading to a high plasma density [267] (see figure 23(b)). This technique has been initially applied for the growth of DLC films for protection against corrosion [268]. Recent work on immersion hollow cathode PECVD has shown that the fabrication of hard coatings such as TiN from halogenated precursors (e.g.…”

Section: Complementary Processes and New Developmentsmentioning

confidence: 99%

Foundations of plasma enhanced chemical vapor deposition of functional coatings

Snyders

Hegemann

Thiry

et al. 2023

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

Since decades, the PECVD (“Plasma Enhanced Chemical Vapor Deposition”) processes have emerged as one of the most convenient and versatile approaches to synthesizing either organic or inorganic thin films on many types of substrates, including complex shapes. As a consequence, PECVD is today utilized in many fields of application such as microelectronic circuit fabrication, optics/photonics, biotechnology, energy, smart textiles, and many others. Nevertheless, owing to the complexity of the process including numerous gas phase and surface reactions, the fabrication of tailor-made materials for a given application is still a major challenge in the field making it obvious that the mastery of the technique can only be achieved through the fundamental understanding of the chemical and physical phenomena involved in the film formation.In this context, the aim of this foundation paper is to share with the readers our perception and understanding of the basic principles behind the formation of PECVD layers considering the co-existence of different reaction pathways that can be tailored by controlling the energy dissipated in the gas phase and/or at the growing surface. We demonstrate that the key parameters controlling the functional properties of the PECVD films are similar whether they are inorganic or organic-like (plasma polymers) in nature, thus supporting a unified description of the PECVD process. Several concrete examples of the gas phase processes and the film behavior illustrate our vision.To complete the document, we also discuss the present and future trends in the development of the PECVD processes and provide examples of important industrial applications using this powerful and versatile technology.

show abstract

“…Discharge plasma for sterilization of narrow tube inner surface, in terms of bactericidal effect, compared with ozone and UV light irradiation, [12] has more application prospects with a self-enhanced plasma discharge effect under certain conditions. [13,14] However, low-pressure plasma sterilization is most likely only suitable for the sterilization of relatively smooth outer surfaces and not for narrow tubes, unless the plasma is ignited inside the tube without a reliable sterilization function. Here, atmospheric pressure plasmas might be more suitable because they are much cheaper to develop for a specific medical device.…”

mentioning

confidence: 99%

An atmospheric pressure plasma device with multiple ring electrodes for decontamination of flexible tubing with variable scales

Jin

Zhao

Zou

et al. 2023

Plasma Processes & Polymers

View full text Add to dashboard Cite

Plasma bacteria decontamination devices for the inner surface of medical tubes have to consider more practical application problems, such as the processing compatibility for medical tubes of variable scales, a reasonable and effective design model for plasma electrode parameters, and so on. This paper proposes a novel multisegment‐casing ring‐ring jet (MSC‐RRJ) without embedding the electrode into the target tube, obtaining the variable tube length processing capability. And through establishing an effective design model based on electric field distribution properties, ensuring the electric field strength margin in each segment of MSC‐RRJ to achieve the processing capability of variable tube diameters. A prototype device is developed based on the proposed MSC‐RRJ electrode and design method being verified by killing Staphylococcus aureus and Escherichia coli.

show abstract

Self-enhanced plasma discharge effect in the deposition of diamond-like carbon films on the inner surface of slender tube

Cited by 19 publications

References 32 publications

Hypergravity-assisted chemical liquid deposition of nano-granular film on the inner surface of a quartz tube

Hypergravity-assisted chemical liquid deposition of nano-granular film on the inner surface of a quartz tube

Foundations of plasma enhanced chemical vapor deposition of functional coatings

An atmospheric pressure plasma device with multiple ring electrodes for decontamination of flexible tubing with variable scales

Contact Info

Product

Resources

About