Piezoresistive sensors on AFM cantilevers with atomic resolution

Jumpertz, R.; Hart, A. van der; Ohlsson, O.; Saurenbach, F.; Schelten, J.

doi:10.1016/s0167-9317(98)00102-6

Cited by 37 publications

(19 citation statements)

References 4 publications

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“…To determine the tensile load acting on a single nanofiber, a piezoresistive AFM cantilever ͑Park Scientific Instruments, CA, USA͒ with a typical spring constant of 8 N / m is used to measure the micro/nano-Newton forced induced. 12,13 Each cantilever is 155 m long and contains resistive strain gauges integrated into its flexible arms. Deflection of the cantilever tip results in a linear change in resistance.…”

mentioning

confidence: 99%

Tensile test of a single nanofiber using an atomic force microscope tip

Tan

Goh

Sow

et al. 2005

Applied Physics Letters

111

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In this study, an approach using an atomic force microscope (AFM) tip to stretch a single electrospun polyethylene oxide (PEO) nanofiber is demonstrated. One end of the nanofiber is attached to a movable optical microscope stage and the other end of the nanofiber to a piezoresistive AFM cantilever tip. The nanofiber is stretched by moving the microscope stage and the force is measured via the deflection of the cantilever. The elastic modulus of PEO nanofiber is found to be about 45MPa.

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mentioning

confidence: 99%

Tensile test of a single nanofiber using an atomic force microscope tip

Tan

Goh

Sow

et al. 2005

Applied Physics Letters

111

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“…Upon heating of the layer sandwich, the cantilever bends, and the bending can be precisely controlled through the heating current passing the diffused heating resistor at the surface of the silicon. To detect the cantilever deflection upon force exerted on the tip, four piezoresistors (resistors that change their resistance upon mechanical stress) are arranged at the cantilever base in a Wheatstone-bridge configuration (15,16,21). Two of them are This paper was submitted directly (Track II) to the PNAS office.…”

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confidence: 99%

“…The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment. To overcome these limitations, AFM probes with integrated detection schemes such as capacitive (13), piezoelectric or piezoresistive schemes (10,(14)(15)(16)(17), and highspeed scanning systems that rely on arrays of cantilevers featuring piezoelectric excitation and piezoresistive͞piezoelectric readout (10,(18)(19)(20) have been developed. All of those systems, however, require a larger set of desktop equipment because no integrated electronics or functions are provided.…”

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confidence: 99%

Single-chip mechatronic microsystem for surface imaging and force response studies

Hafizovic

Barrettino

Volden

et al. 2004

Proc. Natl. Acad. Sci. U.S.A.

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We report on a stand-alone single-chip (7 ؋ 10 mm) atomic force microscopy unit including a fully integrated array of cantilevers, each of which has an individual actuation, detection, and control unit so that standard atomic force microscopy operations can be performed by means of the chip only without any external controller. The system offers drastically reduced overall size and costs as well as increased scanning speed and can be fabricated with standard complementary metal oxide semiconductor technology with some subsequent micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for the controlling and monitoring of all system functions. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters, a powerful digital signal processor, and an on-chip digital interface for data transmission, notably improves the overall system performance. The microsystem characterization evidenced a vertical resolution of <1 nm and a force resolution of <1 nN as shown in the measurement results. The monolithic system represents a paradigm of a mechatronic microsystem that allows for precise and fully controlled mechanical manipulation in the nanoworld.atomic force microscopy ͉ cantilever ͉ complementary metal oxide semiconductor N ew measurement, metrology, and imaging techniques have been pivotal to the rapid development of many branches of science such as materials science, microelectronics, and microbiology, to name a few. The invention of the scanning-tunneling microscope by Binning and Rohrer in 1982 (1) and, in particular, the invention of the atomic force microscope (AFM) in 1986 (2) have established a basis for many findings in various scientific areas over the last years. The AFM has evolved at an exceptional speed from a laboratory prototype to a commercial instrument (consider, e.g., Veeco Instruments, Woodbury, NY) and many other scanning probe techniques (3) have been developed, which will not be further mentioned here. The AFM has been used to measure forces during stretching of DNA strands (4) and rupture forces of single covalent bonds (5) and can be operated in liquids, which enables its use in biological applications (6-8). The AFM also can be used to perform surface manipulations such as lithographic fabrication of a transistor (9, 10) or AFM-based data storage (11,12).Commercially available AFM instruments are rather bulky and have a low throughput because of the serial nature of the involved scanning process and the limited scanning range, which renders the investigation of larger samples rather laborious. The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment. To overcome these limitations, AFM probes with integrated detection schemes such as capacitive (13), piezoelectric or piezore...

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“…The cantilevers were relatively big (1000 lm Â 220 lm Â 20 lm) and they demonstrated topographical images of structured (50 nm-1 lm) surfaces. Similar devices were fabricated by Jumpertz et al [88], who demonstrated good imaging capabilities by measuring, e.g. steps in pyrolytic graphite surfaces.…”

Section: Cantilevers For Scanning Probe Microscopymentioning

confidence: 87%

Piezoresistive cantilevers for nanomechanical sensing

Bausells

2015

Microelectronic Engineering

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Piezoresistive sensors on AFM cantilevers with atomic resolution

Cited by 37 publications

References 4 publications

Tensile test of a single nanofiber using an atomic force microscope tip

Tensile test of a single nanofiber using an atomic force microscope tip

Single-chip mechatronic microsystem for surface imaging and force response studies

Piezoresistive cantilevers for nanomechanical sensing

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