Piezoresistive Pressure Sensor Design, Simulation and Modification using Coventor Ware Software

Dennis, John Ojur; Sihat, M. S. B. Mat; Ahmed, Ali; Ahmad, Farooq

doi:10.3923/jas.2011.1426.1430

Cited by 6 publications

(2 citation statements)

References 1 publication

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“…From fig. 7 it can be concluded that the maximum output voltage can be obtained when the resistors are placed with an offset from the boundary [4]. Figure 8 shows the arrangement of piezoresistors on the double diaphragm in which four piezoresistors each are placed on inner and outer diaphragms at a position that can result in the highest output.…”

Section: Comparison Of Output Voltages For Single and Double Diaphragmmentioning

confidence: 99%

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

Chaudhary¹,

Komaragiri²

2013

AMM

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MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

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Section: Comparison Of Output Voltages For Single and Double Diaphragmmentioning

confidence: 99%

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

Chaudhary¹,

Komaragiri²

2013

AMM

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“…This sensor has a sensitivity of 69.9 Hz/T and a resolution of 217 nT, but its output is highly temperature dependent [ 9 ]. Magnetic field sensors based on MEMS technologies often use the resonance principle and the change in resonance (frequency or amplitude) is sensed through piezoresistive [ 10 , 11 ], capacitive [ 12 , 13 ] or optical sensing methods [ 14 , 15 ]. The MEMS magnetic field sensors that rely on magnetic materials [ 16 ] have the problem of hysteresis and they need special techniques for the deposition of magnetic materials that increases their fabrication cost.…”

Section: Introductionmentioning

confidence: 99%

Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Dennis

Ahmad

Khir

et al. 2015

Sensors

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Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor is designed, fabricated and optically characterized. The sensor is fabricated by using CMOS thin layers and dry post micromachining is used to release the device structure and finally the sensor chip is packaged in DIP. The sensor consists of a shuttle which is designed to resonate in the lateral direction (first mode of resonance). In the presence of an external magnetic field, the Lorentz force actuates the shuttle in the lateral direction and the amplitude of resonance is measured using an optical method. The differential change in the amplitude of the resonating shuttle shows the strength of the external magnetic field. The resonance frequency of the shuttle is determined to be 8164 Hz experimentally and from the resonance curve, the quality factor and damping ratio are obtained. In an open environment, the quality factor and damping ratio are found to be 51.34 and 0.00973 respectively. The sensitivity of the sensor is determined in static mode to be 0.034 µm/mT when a current of 10 mA passes through the shuttle, while it is found to be higher at resonance with a value of 1.35 µm/mT at 8 mA current. Finally, the resolution of the sensor is found to be 370.37 µT.

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Piezoelectric MEMS Technologies

Korobova

2017

Advanced Piezoelectric Materials

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Piezoresistive Pressure Sensor Design, Simulation and Modification using Coventor Ware Software

Cited by 6 publications

References 1 publication

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor

Piezoelectric MEMS Technologies

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