2013
DOI: 10.1109/ted.2013.2274817
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Piezoelectric Strain Modulation in FETs

Abstract: We report on a feature for the transistor, a piezoelectric layer to modulate the strain in the channel. The strain is proportional to the gate-source voltage, and thus increases as the device is turned on. As a result, the device has the leakage current of a relaxed device and the lower threshold voltage of a strained device. Our results, obtained by combining electrical and mechanical simulations, demonstrate that strain modulation can result in a 9 mV/decade smaller subthreshold swing for a FinFET.

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Cited by 26 publications
(33 citation statements)
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“…Voltage scaling, however, necessitates steep slope devices which in turn require operation beyond Boltzmann statistics. Several steep switching device concepts like tunneling FETs 15 16 , piezoelectric strain modulated Si FinFETs 17 , negative capacitance ferroelectric FETs 18 excitonic FETs 19 and spin-based FETs 20 21 have been proposed. Among these, tunneling FETs are the most matured candidates which have experimentally demonstrated SS less than 60 mV/decade 15 .…”
mentioning
confidence: 99%
“…Voltage scaling, however, necessitates steep slope devices which in turn require operation beyond Boltzmann statistics. Several steep switching device concepts like tunneling FETs 15 16 , piezoelectric strain modulated Si FinFETs 17 , negative capacitance ferroelectric FETs 18 excitonic FETs 19 and spin-based FETs 20 21 have been proposed. Among these, tunneling FETs are the most matured candidates which have experimentally demonstrated SS less than 60 mV/decade 15 .…”
mentioning
confidence: 99%
“…More recently, we have proposed the so-called piezoelectric field-effect transistor ( -FET) [ 15 , 16 ] in which an FE layer is implemented (see Figure 5 ). The basic idea is that the strain in the semiconductor body can be tuned by the converse -effect.…”
Section: The Piezoelectric Field-effect Transistormentioning
confidence: 99%
“…The strain influences the semiconductor transport properties: it reduces the band gap and depending on the device/crystal orientation it also increases the charge carrier mobility. This reduces the [ 16 ].…”
Section: The Piezoelectric Field-effect Transistormentioning
confidence: 99%
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“…But a further lowering will require disruptive transistor technologies, where off-state leakage is not governed by carrier diffusion. Examples are tunnelling transistors [10,11] and the piezo-FET [12].…”
Section: State Of the Art In Microfabricationmentioning
confidence: 99%