Piezoelectric MEMS resonant gas sensor for defence applications

Khine, Lynn; Tsai, J. M.; Heidari, Amir; Yoon, Yong‐Jin

doi:10.1109/dsr.2011.6026862

Cited by 10 publications

(8 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The sensitivity was found to be 16.9-83.3 ppm at the range of response time of 46 s/167 s. sensitivity to mass loading based on piezoelectric excitation is investigated for chemical sensing [118,119] reported piezoelectric transduction of flexuralmode silicon resonators to achieve efficient temperature compensation. The resonance gas sensor using piezoelectric MEMS for defence applications was reported [120].…”

Section: Piezoelectric Actuationmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

View full text Add to dashboard Cite

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

show abstract

Section: Piezoelectric Actuationmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

View full text Add to dashboard Cite

show abstract

“…Chemical gas sensors have found a wide range of applications in defense, [1][2][3] safety, and disease diagnosis. [4][5][6][7] To enhance sensitivity, low-dimensional materials such as nanoparticles, [8][9][10][11] polycrystalline thin films, [12][13][14] chemical-vapor-deposited nanowires (NWs) [15][16][17] and 2D atomically thin materials [18][19][20] are often used as gas sensors due to their high surface-to-volume ratio (SVR) compared with bulk material.…”

Section: Introductionmentioning

confidence: 99%

Analytical Gas‐Sensing Responses for Single‐Crystalline Semiconducting Gas Sensors

Liu,

Li,

et al. 2023

Advanced Sensor Research

View full text Add to dashboard Cite

In this study, an analytical gas response formula is developed based on the classical gaseous molecule adsorption model. To validate the analytical formula, an array of silicon nanowires or microwires is fabricated by patterning the device layer of a silicon‐on‐insulator (SOI) wafer. Gas Hall effect measurements reveal that the surface depletion of the wires narrows down upon exposure to polar molecules that act as dipoles to partially neutralize the surface charges. Gas conductance measurements are performed on different sizes of wires at elevated temperatures. The responses on exposure to different concentrations of water, acetone, and ethanol vapors can be well fitted with the analytical gas response formula. The extracted parameters are consistent with their physical nature. Additionally, the established analytical gas response formula can also well fit gas responses of single‐crystalline nanowires in literature, which further validates the analytical formula.

show abstract

“…Resonant sensors are one the most versatile and promising type of MEMS sensors as they offer high resolution [9], high accuracy (0.01% Full Scale) and low drift (<100 ppm full scale, per year) [10]. Different applications such as gas monitoring [6], pressure monitoring [5], accelerometers [7], ultrasound applications [8] has been reported. A general resonating device needs to be excited in order to generate a vibration, which can be done in different ways such as optical excitation [11], electrostatic excitation[4], electro-magnetic excitation [12] and etc.…”

Section: Introductionmentioning

confidence: 99%

Bidirectional front-end for piezoelectric resonator

Marchetti

Berg

Mirmotahari

et al. 2016

2016 IEEE 13th International Conference on Networking, Sensing, and Control (ICNSC)

View full text Add to dashboard Cite

This paper presents a bidirectional circuit as frontend for piezoelectric ceramic resonators. The front-end both actives and reads the response of the resonator in different directions and the directionality of the front-end is controlled by swapping the supply rails. Experimental results are obtained by measuring on a semi-discrete board prototype. The resonant frequency of the sensor is 110kHz, the bandwidth of the bidirectional front-end is 1kHz − 500kHz which was implemented by using a CD4007UBE IC. Results show that the system provides an easy and effective way to send an activation signal and to read the response of a piezoelectric resonator.

show abstract

Piezoelectric MEMS resonant gas sensor for defence applications

Cited by 10 publications

References 9 publications

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Analytical Gas‐Sensing Responses for Single‐Crystalline Semiconducting Gas Sensors

Bidirectional front-end for piezoelectric resonator

Contact Info

Product

Resources

About