2018
DOI: 10.1063/1.5030545
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Piezoelectric graphene field effect transistor pressure sensors for tactile sensing

Abstract: This paper presents graphene field-effect transistor (GFET) based pressure sensors for tactile sensing. The sensing device comprises GFET connected with a piezoelectric metal-insulator-metal (MIM) capacitor in an extended gate configuration. The application of pressure on MIM generates a piezo-potential which modulates the channel current of GFET. The fabricated pressure sensor was tested over a range of 23.54-94.18 kPa, and it exhibits a sensitivity of 4.55 Â 10 À3 kPa À1. Further, the low voltage ($100 mV) o… Show more

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Cited by 93 publications
(86 citation statements)
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References 26 publications
(32 reference statements)
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“…In fact, due to these features they are widely used in exible electronics. [102][103][104][105][106][107][108][109][110] The user comfort and safety are also important prerequisites for on-body sensors and substrates. In this regards, biocompatible polymeric substrates such as polydimethylsiloxane (PDMS) have been explored for the fabrication of pH sensors.…”
Section: Substrates For Exible Sensorsmentioning
confidence: 99%
“…In fact, due to these features they are widely used in exible electronics. [102][103][104][105][106][107][108][109][110] The user comfort and safety are also important prerequisites for on-body sensors and substrates. In this regards, biocompatible polymeric substrates such as polydimethylsiloxane (PDMS) have been explored for the fabrication of pH sensors.…”
Section: Substrates For Exible Sensorsmentioning
confidence: 99%
“…The force applied to piezoelectric transducer results in a net dipole moment within the piezoelectric material due to the noncentrosymmetric property of the material, resulting in the generation of piezopotential. The relationship between applied force and charge generated can be approximately described as[14a]Q=d33Fwhere d 33 is the piezoelectric coefficient and F is the applied force. As the generated charge density is linearly dependent on the applied pressure (force per unit area), the generated piezopotential is directly dependent on the magnitude of pressure.…”
Section: Resultsmentioning
confidence: 99%
“…The fingerprint patterns on the skin and the interlocked microstructures at the interface of epidermal and dermal layers also improve the perception of fine texture by amplifying the vibrotactile signals when the finger is scanned over a surface . However, most of the reported pressure sensors provide the perception of either static or dynamic pressure . A wide variety of advanced materials such as carbon nano‐tubes (CNTs), organic polymers, graphene, and silicon have been explored for these sensors [2d,15].…”
Section: Introductionmentioning
confidence: 99%
“…These results indicate that the external strain could be used as stimuli to modulate the channel current and in this regard the presented FET could also be used as a strain sensor. The modulation of device channel current by external stimuli such as touch/contact force, temperature and even chemicals has been used in past to obtain highly sensitive physical and chemical sensors [4], [31]- [35]. Further, we have studied the impact of the strain on the performance of the TFET based 10 stage inverter chain ( Fig.…”
Section: Resultsmentioning
confidence: 99%