Physics of Amorphous Silicon–Carbon Alloys

Bullot, J.; Schmidt, M.

doi:10.1002/pssb.2221430202

Cited by 464 publications

(151 citation statements)

References 208 publications

(66 reference statements)

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“…It is reported that the incorporation of Si into carbon network structures promoted the formation of sp 3 carbon clusters [16]. Many researches have been reported on introduction of Si into DLC [17][18][19][20], but the friction and wear properties in the presence of MoDTC are not clear as to the highly sp 3 bonded structure like ta-C induced by Si.…”

Section: Introductionmentioning

confidence: 99%

Friction and Wear Properties of Tetrahedral Si-Containing Hydrogenated Diamond-Like Carbon Coating under Lubricated Condition with Engine-Oil Containing ZnDTP and MoDTC

Komori

Umehara

2017

Tribology Online

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In this study, we investigated tribological properties of "tetrahedral" Si-containing hydrogenated DLC coating (TMS coating) during sliding against steel or cast-iron lubricated with engine-oil containing MoDTC and ZnDTP additives. TMS coatings derived from only tetramethylsilane were prepared using PACVD with high-bias process. TMS coating had the highly carbon sp 3 bonded structure induced by Si (over 20 at.%) with high hydrogen content (30 at.%). TOF-SIMS analysis showed that TMS coating could form the additive-derived tribofilm on both of the non-ferrous coating surface and the ferrous counter surface to promote Mo-sulfide formation effectively, leading a low friction coefficient. The tribo-chemical reactions were related not only to Mo-sulfides formation, but also reduction of Mo-oxides. Mo-oxides could react with DLC material and induce hydrogen evolution and transformation into further weak carbon structure, causing an increasing wear of hydrogenated DLCs. TMS coating showed no significant wear in spite of plenty hydrogen content. Si induced sp 3 bond and could act so as not to induce clustering of the sp 2 phase. This could inhibit increasing wear of the DLC in the presence of MoDTC. The effectiveness of TMS coating in friction and wear behavior was shown to depend on tribo-chemical reactions and transformation of carbon bond structure.

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Section: Introductionmentioning

confidence: 99%

Friction and Wear Properties of Tetrahedral Si-Containing Hydrogenated Diamond-Like Carbon Coating under Lubricated Condition with Engine-Oil Containing ZnDTP and MoDTC

Komori

Umehara

2017

Tribology Online

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“…Indeed, a-SiC:H films are extensively studied both as typical materials of an amorphous system with variable disorder and microstrustures, [1][2][3] and for potential applications such as optoelectronic devices, 4) solar cells, 5) high temperature coatings 6) and X-ray masks. 7) The main reason for its success in device applications is that by incorporating hydrogen during plasma deposition, the paramagnetic dangling bonds are saturated, 8) which reduces the gap state density significantly and makes the n-and p-type doping possible.…”

Section: Introductionmentioning

confidence: 99%

Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD

et al. 2002

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Effects of annealing temperature (T a ) on the structure of hydrogenated amorphous silicon carbide (a-SiC:H) films prepared by RF plasma chemical vapor deposition (CVD) method are investigated by using Fourier Transform-Infrared Spectrometry (FT-IR), X-ray Photoelectron Spectroscopy (XPS) and UV-VIS spectrophotometer techniques. It is found that an annealing process results in structural rearrangement and evacuation of hydrogen atoms from CH n and SiH n bonds. The emission of hydrogen bonded to silicon and carbon responsible for the decrease of optical band gap (E opt ) by 0.70 eV in the range of T a from 573 to 873 K. This hydrogen loss is interpreted in terms of hydrogen molecule formation and outerdiffusion. In addition, the surface morphology of films was investigated by atomic force microscopy (AFM).

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“…2. The spectrum of as-deposited sample is composed by strong absorption bands at 780 cm -1 (Si-C stretching) and Table. The absorption band at 1010 cm -1 in a-Si 1-x C x :H films is commonly ascribed to rocking/waging vibration modes in CH 2 radicals bonded to silicon atoms -Si-CH 2 -Si [23][24][25][26][27]. But it is well known that the main absorption band in silicon sub-oxide SiO x (x < 2) is also located at 1000…1400 cm -1 depending on x [20].…”

Section: Resultsmentioning

confidence: 99%

“…dry argon) and (3) oxidation effects. From the "classical" viewpoint, PL efficiency in amorphous VIgroup semiconductors (a-Si:H, a-C:H, a-SiC:H) is mainly determined by competition of radiative recombination from the conduction band tail to the valence band one (tail-to-tail transition) and nonradiative recombination path through mid-gap paramagnetic defect states [25]. The efficiency of radiative recombination in this model is reversely proportional to the concentration of non-radiative recombination centers associated mainly with paramagnetic dangling bonds.…”

Section: Resultsmentioning

confidence: 99%

Photoluminescent properties of oxidized stochiometric and carbon-rich amorphous Si1-xCx:H films

Vasin¹

2015

Semicond. Phys. Quantum Electron. Optoelectron.

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Abstract. Near-stochiometric and carbon-rich a-Si 1−x C x :H thin films were deposited using the magnetron sputtering of Si target in Ar/CH 4 gas mixture. As-deposited nearstochimetric (x = 0.5) sample showed weak blue photoluminescence (PL), while PL of as-deposited carbon-rich (x = 0.7) sample was 20 times stronger and white in color. The films were annealed in pure argon, wet argon, and dry oxygen at 450 °C for 30 min. The intensity of PL in a-Si 1−x C x :H layers were enhanced by the factor from 2 to 12 after annealing in dependence on the annealing atmosphere. The strongest oxidation and strongest light emission were observed in carbon-rich series (x = 0.7) after annealing in oxidizing atmosphere. Structural properties of the films were characterized by infra-red absorption spectroscopy, ellipsometry and electron paramagnetic resonance. The effect of carbon enrichment of a-Si 1−x C x :H films and annealing atmosphere on the evolution of photoluminescence and local interatomic bonding structure in annealed material were studied and analyzed. It has been found that main effects of thermal treatments is strong enhancement of photoluminescence accompanied by formation of Si:C-H n and Si-O x C y bonding. The strongest oxidation effect as well as strongest photoluminescence were observed in carbon-rich a-SiC:H films.

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Physics of Amorphous Silicon–Carbon Alloys

Cited by 464 publications

References 208 publications

Friction and Wear Properties of Tetrahedral Si-Containing Hydrogenated Diamond-Like Carbon Coating under Lubricated Condition with Engine-Oil Containing ZnDTP and MoDTC

Friction and Wear Properties of Tetrahedral Si-Containing Hydrogenated Diamond-Like Carbon Coating under Lubricated Condition with Engine-Oil Containing ZnDTP and MoDTC

Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD

Photoluminescent properties of oxidized stochiometric and carbon-rich amorphous Si1-xCx:H films

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