Photopatternable Conductive PDMS Materials for Microfabrication

Cong, Hailin; Pan, Tingrui

doi:10.1002/adfm.200701437

Cited by 175 publications

(126 citation statements)

References 42 publications

(44 reference statements)

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“…For example, chemisorptions that result in charge exchange between the adsorbate and its substrate might produce a conductivity change in the substrate. The advent of MEMS microfabrication techniques 16 and nanotechnology has significantly altered the e-nose paradigm. Because of their very high surface-to-volume ratios, nanoparticles and nanowires can in principle be used to create very sensitive sensors leading to e-nose designs with enhanced sensitivities.…”

Section: ϫ15mentioning

confidence: 99%

Tin-Oxide-Nanowire-Based Electronic Nose Using Heterogeneous Catalysis as a Functionalization Strategy

et al. 2010

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An electronic nose (e-nose) strategy is described based on SnO 2 nanowire arrays whose sensing properties are modified by changing their operating temperatures and by decorating some of the nanowires with metallic nanoparticles. Since the catalytic processes occurring on the metal nanoparticles depend on the identity of the metal, decorating the semiconducting nanowires with various metal nanoparticles is akin to functionalizing them with chemically specific moieties. Other than the synthesis of the nanowires, all other steps in the fabrication of the e-nose sensors were carried out using top-down microfabrication processes, paving the way to a useful strategy for making low cost, nanowire-based e-nose chips. The sensors were tested for their ability to distinguish three reducing gases (H 2 , CO, and ethylene), which they were able to do unequivocally when the data was classified using linear discriminant analysis. The discriminating ability of this e-nose design was not impacted by the lengths or diameters of the nanowires used.

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Section: ϫ15mentioning

confidence: 99%

Tin-Oxide-Nanowire-Based Electronic Nose Using Heterogeneous Catalysis as a Functionalization Strategy

et al. 2010

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“…PDMS is a widely used material for fabricating lFDs (Gong and Wen 2009;Zhou et al 2010;Vullev et al 2006; Thomas et al 2010a). Despite its shortcomings, such as porosity (Li et al 2009;Mehta et al 2009;Chueh et al 2007;Shin et al 2003) and susceptibility to a broad range of organic solvents (Lee et al 2003), PDMS is biocompatible (Belanger and Marois 2001;Zhuang et al 2007) and allows for expedient and facile reproduction of features with nanometer precision that are essential for lFDs (Gates 2005;Cong and Pan 2008).…”

Section: Introductionmentioning

confidence: 99%

Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the composition of the oxidizing plasma

Chau

Millare

Lin

et al. 2010

Microfluid Nanofluid

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Controlled surface oxidation of polydimethylsiloxane (PDMS) is essential for permanent adhesion between device components composed of this elastomer. The permanent adhesion between such microdevice components results from covalent crosslinking across the interfaces between PDMS and other silica-based materials, such as glass, quartz, and PDMS. Optimal duration and conditions of oxidation, attained via treatments with oxygen-containing plasma, are crucial for microfabrication procedures with quantitative yields. While insufficient PDMS oxidation does not provide high enough surface density of siloxyl groups for cross-interface linking, overoxidation of PDMS yields rough silica surface layers that prevent the adhesion between flat substrates. Ideally, for a set of plasma conditions, the range of treatment durations producing permanent adhesion should be as broad as possible: i.e., the surface oxidation of PDMS sufficient for irreversible binding has to complete significantly before the effects of overoxidation become apparent. Such a requirement assures that relatively small fluctuations in the treatment conditions will not result in over-or under-oxidation and, hence, will not compromise the yields of the fabrication procedures. We examined the dependence of the quality of adhesion (QA) between plasma-treated PDMS and glass substrates on the composition of the oxygen-containing plasma and on the radio frequency (RF) of the plasma generator. We observed that plasma generated at megahertz RF provided superior conditions than kilohertz RF. Concurrently, an increase in the oxygen content of binary gas mixtures, used for the plasma, broadened the treatment durations that afford superior QA.

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“…Contact lenses with integrated electric circuits have been proposed. 78,79 Pharmacological stumulation of ion pumping to enhance the transcorneal potential and the wound EF and to enhance wound healing appears to be a promising strategy in the cornea. 11,13,16,62 See also the Diabetic disease model section.…”

mentioning

confidence: 99%