2010
DOI: 10.1117/12.854245
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Photonic crystal microcavity in GaN-on-sapphire slab waveguide for sensor applications

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Cited by 4 publications
(1 citation statement)
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“…18,19 However, it has been recently determined as a potential material system for technologies, such as PhC-based circuits and applications. [20][21][22] AlN as a buffer layer is significant for fabrication of GaN, which is in the previous study has reported that the growth of GaN was deposited on the AlN buffer layer. As well known, the lattice mismatch AlN buffer layer between GaN is 17%.…”
Section: Introductionmentioning
confidence: 99%
“…18,19 However, it has been recently determined as a potential material system for technologies, such as PhC-based circuits and applications. [20][21][22] AlN as a buffer layer is significant for fabrication of GaN, which is in the previous study has reported that the growth of GaN was deposited on the AlN buffer layer. As well known, the lattice mismatch AlN buffer layer between GaN is 17%.…”
Section: Introductionmentioning
confidence: 99%