Photo-definable microchannels made with spin-on polymers and short sacrificial etch times

Carron, C.; Phillips, Mallory; Phillips, Brian S.; Parks, Laurie-Anne; Schultz, Stephen M.; Hawkins, Aaron R.

doi:10.1007/s10404-009-0404-y

Cited by 2 publications

(2 citation statements)

References 26 publications

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“…Specially, we have used photoresist or SU8, a photosensitive epoxy, for sacrificial cores. We encapsulated them with plasma-enhanced chemical vapor deposition (PECVD) silicon dioxide and silicon nitride thin films to create microchannels with rectangular and arched coreshaped cross sections [18][19][20][21][22]. The CE microchips we made used optical fluorescence methods to detect the separated samples [23].…”

Section: Introductionmentioning

confidence: 99%

Contactless conductivity detection of small ions in a surface micro‐machined CE chip

et al. 2010

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A microchip is presented which is capable of CE separations and is built using exclusively thin film deposition techniques, fully compatible with microelectronics batch processing. Standard photolithography provides control of the spacing between electrodes used in conductivity measurement and overall channel geometry. Fluid channels are arranged as a double-T injector with a 50 microm offset at the arm intersection. The chip's performance was tested using concentrations of sodium chloride and calcium chloride ranging from 1 microM to 1 mM in a 5-mM MES/histidine buffer. Separations were performed by applying different voltages to reservoirs positioned at the four fluid channel openings. Conductivity detection was performed by applying a small AC voltage (1 Vrms) to the insulated electrodes positioned inside the fluid channels. A computer running LabVIEW controlled the AC signal generation, data acquisition and storage. Measurements indicated that the chip's detection limit was below 1 microM for both sodium and calcium cations.

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Section: Introductionmentioning

confidence: 99%

Contactless conductivity detection of small ions in a surface micro‐machined CE chip

et al. 2010

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“…The time scale required for transfer printing is governed by the kinetics of PAA-Ca 2+ dissolution, which can be described by Deal and Grove. [90][91][92] ( ) ( )…”

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Ultracompliant Hydrogel‐Based Neural Interfaces Fabricated by Aqueous‐Phase Microtransfer Printing

Huang

Ong

Kwon

et al. 2018

Adv Funct Materials

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Hydrogel-based electronics are ideally suited for neural interfaces because they exhibit ultracompliant mechanical properties that match that of excitable tissue in the brain and peripheral nerve. Hydrogel-based multielectrode arrays (MEA) can conformably interface with tissues to minimize inflammation and improve the reliability to enhance signal transduction.However, MEA substrates composed of swollen hydrogels exhibit low toughness and low adhesion stability when laminated on the tissue surface and also present technical challenges for processes commonly employed in MEA fabrication. Here, we describe a new strategy to fabricate ultracompliant MEA based on aqueous-phase transfer printing. This technique employs redox active adhesive motifs in hygroscopic polymer precursors that simultaneously form hydrogels through sol-gel phase transitions and bond to underlying microelectronic structures. Specifically, in situ gelation of 4-arm-polyethylene glycol-grafted catechol [PEG-Dopa]4 hydrogels induced by oxidation using Fe 3+ produces conformal adhesive contact with the underlying MEA, robust adhesion to electronic structures, and rapid dissolution of watersoluble sacrificial release layers. MEA are then integrated on hydrogel-based substrates to produce free standing ultracompliant neural probes, which are then laminated to the surface of the dorsal root ganglia in feline subjects to record single-unit neural activity.

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Photo-definable microchannels made with spin-on polymers and short sacrificial etch times

Abstract: Hollow tubular microfluidic channels were fabricated from two spin-on, photodefinable polymers.

Cited by 2 publications

References 26 publications

Contactless conductivity detection of small ions in a surface micro‐machined CE chip

Contactless conductivity detection of small ions in a surface micro‐machined CE chip

Ultracompliant Hydrogel‐Based Neural Interfaces Fabricated by Aqueous‐Phase Microtransfer Printing

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