2008
DOI: 10.1063/1.2899967
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Phase separation behavior of Ge2Sb2Te5 line structure during electrical stress biasing

Abstract: We report the breakdown behavior of a patterned Ge2Sb2Te5 multiline structure during the voltage-driven electric stress biasing. Scanning Auger microscope analysis shows that the breakdown process accompanies with a phase separation of Ge2Sb2Te5 into an Sb, Te-rich phase and a Ge-rich phase. The phase separation is explained by the incongruent melting of Ge2Sb2Te5 based on the pseudobinary phase diagram between Sb2Te3 and GeTe. It is claimed that this phase separation behavior by incongruent melting provides o… Show more

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Cited by 45 publications
(20 citation statements)
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“…The stuck set can be attributed to the gradual development of a concentration gradient by phase separation due to incongruent melting or ionic migration. [ 11–14 ] The stuck reset can be attributed to the failure of the GST/heater interface due to void formation or delamination, which mostly occurs at the GST/other material interface. [ 14–17 ] Delamination is an interfacial fracture and may be affected by the mechanical stress.…”
Section: Materials Thermal Conductivity [W M−1 K−1] Electrical Conductmentioning
confidence: 99%
“…The stuck set can be attributed to the gradual development of a concentration gradient by phase separation due to incongruent melting or ionic migration. [ 11–14 ] The stuck reset can be attributed to the failure of the GST/heater interface due to void formation or delamination, which mostly occurs at the GST/other material interface. [ 14–17 ] Delamination is an interfacial fracture and may be affected by the mechanical stress.…”
Section: Materials Thermal Conductivity [W M−1 K−1] Electrical Conductmentioning
confidence: 99%
“…In some previous studies, doping is beneficial to increase the crystallization temperature of base materials, such as doping N 14,15 , Cu 16 and W 17 . But after doping, phase separation is always accompanied, impeding the further improvement of crystallization speed, deteriorating device performance, and decreasing cycling times 18 . Ti doping was also found to increase the crystallization speed owing to Ti centered atomic motifs in both amorphous and crystalline state 19 .…”
Section: Introductionmentioning
confidence: 99%
“…15 Because GST has an incongruent melting region below the melting temperature, the pseudo-binary phases of Sb 2 Te 3 and GeTe were separated during solidification, which produced Ge-deficient and Sb-rich voids. 16 Therefore, the void area previously consisted of a locally molten state, and the compositional change was initiated during solidification. Fig.…”
mentioning
confidence: 99%