2005
DOI: 10.1143/jjap.44.1994
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Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region

Abstract: A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 µm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ra… Show more

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Cited by 94 publications
(49 citation statements)
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“…Next, the focused beam size was measured by a dark-field knife-edge method [15]. A platinum wire with a diameter of 300 m was used as a knife-edge.…”
Section: Measurements Of Optical Propertiesmentioning
confidence: 99%
“…Next, the focused beam size was measured by a dark-field knife-edge method [15]. A platinum wire with a diameter of 300 m was used as a knife-edge.…”
Section: Measurements Of Optical Propertiesmentioning
confidence: 99%
“…The difference might be caused by error in the section depth and/or disturbance of zone circularity in the multilayer. Figure 5 shows measured line spread functions (LSFs) at the best focus, which were obtained using knife-edge scanning with scattering geometry [14]. The graph shows 10 scans consisting of 5 scans each in opposite directions (upward and downward).…”
Section: Evaluation Of Mzp Focusing Propertiesmentioning
confidence: 99%
“…Recently, the progress of micro-probe X-ray techniques with the synchrotron radiation have allowed smaller-size Xray beams. 14,15) It is expected that the X-ray with the beam size of less than sub-micron level will focus on nanometerlevel structures of more complex corrosion products and reveal mechanisms of corrosion-resistance by trace elements.…”
Section: Micro-beam Xafsmentioning
confidence: 99%