2008
DOI: 10.1063/1.2839288
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Performance of write-line inserted magnetic tunneling junction for low-write-current magnetic random access memory cell

Abstract: We have developed a write-line-inserted magnetic tunneling junction (MTJ) (WLIM) for use in low-write-current magnetoresistance random access memory (MRAM). The write current of the WLIM was reduced to 0.98mA and its thermal stability factor was 85 for a 0.32×0.48μm2 MTJ. We evaluated the switching property of the WLIM in an external magnetic field (Hsw̱ext) and an internal magnetic field (Hsw̱int). We found that Hsw̱ext was larger than Hsw̱int when the aspect ratio of the MTJs was less than 1.5. Furthermore, … Show more

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Cited by 11 publications
(8 citation statements)
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“…We have already developed an MRAM process for a 2T1MTJ MRAM cell as well as a 1-Mbit MRAM macro [5][6]. This process is unique and more suitable for high speed (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…We have already developed an MRAM process for a 2T1MTJ MRAM cell as well as a 1-Mbit MRAM macro [5][6]. This process is unique and more suitable for high speed (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…5 The patterning process for SFF consisted of two steps: first, the FL1 was patterned and the FL2 was patterned after that. A MTJ without FL3 was fabricated on the same wafer as a reference.…”
Section: Methodsmentioning
confidence: 99%
“…The H sw of SVM with FL3 was higher than that of SVM without FL3 because FL2 and FL3 were magnetostatically coupled. 5 The magnetostatic coupling field between FL2 and FL3 increased as the thicknesses of FL2 and FL3 increased. This increase was balanced to decrease in anisotropy of the SFF.…”
Section: B Switching Properties Created By Magnetic Fieldmentioning
confidence: 98%
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“…[8][9][10] We previously proposed a shape-varying MTJ (SVM), 11 which switched by magnetic field, as a three-terminal cell. 12,13 This cell is not scalable, however, the switching current of under 1 mA was enough small to demonstrate logic circuit. The MR ratio of the SVM in which the CoFeB film was used as a free layer was high enough, however, it had a big switching current distribution because of the large intrinsic anisotropy of CoFeB.…”
Section: Introductionmentioning
confidence: 99%