Performance analysis of microcantilever arrays for optical readout uncooled infrared imaging

Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array

“…Within the 8-14 mm spectral band, dP/dT t = 0.63 W/(m 2 K sr). According to G leg =A leg k/l leg , the legs' conductance G leg of a cantilever element with n-fold IMLs can be expressed as [12][13][14]:…”

“…IR images of a 120 1C thermal object have been obtained, even though an FPA is placed in air environment [12]. Lately the author's group has fabricated an FPA containing 100  100 elements (element size: 200 mm  200 mm) and obtained thermal images of room temperature objects with NETD of 650 mK [13,14]. To make progress toward an applicable IR imager, the sensitivity and spatial resolution of an FPA need to be improved, which means an FPA with a smaller sensor element should have a higher sensitivity.…”

Noise sources and improved performance of a mid-wave infrared uncooled silicon carbide optical photodetector

“…Uncooled infrared (IR) detectors such as thermocouples, pyroelectric and ferroelectric detectors, and microbolometers are currently available [6][7][8][9]. Much attention has been paid to fabricating uncooled IR detectors with other operating mechanisms such as the optomechanical IR imaging system with a bimaterial microcantilever array [10][11][12].…”

Infrared imaging using arrays of SiO_2micromechanical detectors

“…Focal plane arrays (FPAs) of such devices with optical [1][2][3][4][5][6][7] and capacitive [8] readouts were used as uncooled IR imagers in a series of recent efforts. Fabrication of micromechanical IR detectors is scalable to multimegapixel arrays [9].…”

“…This gave a thermomechanical responsivity of 4.1 × 10 −3 rad ∕K and a thermal response time of 730 ms. It is worth noting that the predicted responsivity indicates a 70% improvement over devices of similar shape and size made of SiN x and Au [3]. Using the relationships described previously [10], we estimated the noiseequivalent temperature difference (NETD) for the detector to be 1.2 mK excluding any influence of the CCD shot noise or heat loss mechanisms other than conduction.…”