Infrared imaging using arrays of SiO_2micromechanical detectors

Datskos, Panos G.; Lavrik, Nickolay V.; Hunter, S. R.; Rajic, Slobodan; Grbovic, Dragoslav

doi:10.1364/ol.37.003966

Cited by 10 publications

(5 citation statements)

References 13 publications

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“…Al and SiO x are standard microfabrication materials, and can therefore be easily incorporated into the construction of thermal sensors such as microbolometers or bi-material sensors. 31 If these layers are used in a microbolometer pixel, the thickness of the microbridge could be minimized by placing the resistive layer in the dielectric spacer. Further investigation is needed to determine what impact this will have on absorption.…”

Section: Resultsmentioning

confidence: 99%

Al/SiOx/Al single and multiband metamaterial absorbers for terahertz sensor applications

et al. 2013

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Abstract. To increase the sensitivity of uncooled thermal sensors in the terahertz (THz) spectral range (1 to 10 THz), we investigated thin metamaterial layers exhibiting resonant absorption in this region. These metamaterial films are comprised of periodic arrays of aluminum (Al) squares and an Al ground plane separated by a thin silicon-rich silicon oxide (SiO x ) dielectric film. These standard MEMS materials are also suitable for fabrication of bi-material and microbolometer thermal sensors. Using SiO x instead of SiO 2 reduced the residual stress of the metamaterial film. Finite element simulations were performed to establish the design criteria for very thin films with high absorption and spectral tunability. Single-band structures with varying SiO x thicknesses, square size, and periodicity were fabricated and found to absorb nearly 100% at the designed frequencies between three and eight THz. Multiband absorbing structures were fabricated with two or three distinct peaks or a single-broad absorption band. Experimental results indicate that is possible to design very efficient thin THz absorbing films to match specific applications.

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Section: Resultsmentioning

confidence: 99%

Al/SiOx/Al single and multiband metamaterial absorbers for terahertz sensor applications

et al. 2013

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“…To overcome the limitations and drawbacks of previous CVG designs, we focused on an approach that takes advantage of silicon resonating structures that can be batch-fabricated using relaxed design rules due to the absence of on-chip electronics. Using well-established photolithographic patterning and wafer-scale processing 48 , we implemented resonator geometries compatible with large oscillation amplitudes and, in turn, oscillation velocities. Furthermore, a modular optical readout based on discrete components eliminates potential electronic interference without increased fabrication cost and complexity.…”

Section: Methodsmentioning

confidence: 99%

Optically read Coriolis vibratory gyroscope based on a silicon tuning fork

Lavrik

Datskos

2019

Microsyst Nanoeng

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In this work, we describe the design, fabrication, and characterization of purely mechanical miniature resonating structures that exhibit gyroscopic performance comparable to that of more complex microelectromechanical systems. Compared to previous implementations of Coriolis vibratory gyroscopes, the present approach has the key advantage of using excitation and probing that do not require any on-chip electronics or electrical contacts near the resonating structure. More specifically, our design relies on differential optical readout, each channel of which is similar to the “optical lever” readout used in atomic force microscopy. The piezoelectrically actuated stage provides highly efficient excitation of millimeter-scale tuning fork structures that were fabricated using widely available high-throughput wafer-level silicon processing. In our experiments, reproducible responses to rotational rates as low as 1.8 × 103° h−1 were demonstrated using a benchtop prototype without any additional processing of the raw signal. The noise-equivalent rate, ΩNER, derived from the Allan deviation plot, was found to be <0.5° h−1 for a time of 103 s. Despite the relatively low Q factors (<104) of the tuning fork structures operating under ambient pressure and temperature conditions, the measured performance was not limited by thermomechanical noise. In fact, the performance demonstrated in this proof-of-principle study is approximately four orders of magnitude away from the fundamental limit.

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“…3 Focal plane array of bimaterial cantilevers has noise equivalent temperature difference (NETD) of 50-200 mK, which is comparable to the NETD of the most recent microbolometer IR detectors, 35-200 mK. 1,13,14 Thus, multiple groups have explored the applications of bimaterial cantilevers in portable IR imaging 7,9,15,16 and IR spectroscopic systems. 8,17,18 To make bimaterial cantilever IR detectors practical for applications, despite this progress, it is still necessary to improve their sensitivity.…”

Section: Introductionmentioning

confidence: 99%

“…[1][2][3][4][5][6][7][8][9][10] The bimaterial cantilevers have shown a potential as a novel uncooled IR detector by exhibiting IR sensitivity similar to traditional methods but with lower cost and faster response time ($0.1-1 ms). 1,11,12 Published research has shown that a bimaterial cantilever can detect radiative power of 250 pW/Hz 0.5 at the wavelength of 650 nm, 6 or 1.3 nW/Hz 0.5 at the wavelength of 10 lm. 3 Focal plane array of bimaterial cantilevers has noise equivalent temperature difference (NETD) of 50-200 mK, which is comparable to the NETD of the most recent microbolometer IR detectors, 35-200 mK.…”

Section: Introductionmentioning

confidence: 99%

“…8,17,18 To make bimaterial cantilever IR detectors practical for applications, despite this progress, it is still necessary to improve their sensitivity. 1,8 Optical and thermomechanical properties determine the cantilever sensitivity, which are related to the cantilever material and geometry. 3,8,17 To improve the cantilever thermomechanical properties, various groups have designed cantilevers with large length, small width, and optimum layer thicknesses to achieve large thermal expansion mismatch stress, small thermal conductance, and small mechanical stiffness.…”

Section: Introductionmentioning

confidence: 99%

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Large infrared absorptance of bimaterial microcantilevers based on silicon high contrast grating

Kwon

Seong

Liu

et al. 2013

Journal of Applied Physics

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Manufacturing sensors for the mid-IR spectral region (3-11 lm) are especially challenging given the large spectral bandwidth, lack of convenient material properties, and need for sensitivity due to weak sources. Here, we present bimaterial microcantilevers based on silicon high contrast grating (HCG) as alternatives. The grating integrated into the cantilevers leverages the high refractive index contrast between the silicon and its surrounding medium, air. The cantilevers with HCG exhibit larger active spectral range and absorptance in mid-IR as compared to cantilevers without HCG. We design and fabricate two types of HCG bimaterial cantilevers such that the HCG resonance modes occur in mid-IR spectral region. Based on the measurements using a Fourier transform infrared (FTIR) microspectrometer, we show that the HCG cantilevers have 3-4X wider total IR absorptance bandwidths and 30% larger absorptance peak amplitude than the cantilever without HCG, over the 3-11 lm wavelength region. Based on the enhanced IR absorptance, HCG cantilevers show 13-47X greater responsivity than the cantilever without HCG. Finally, we demonstrate that the enhanced IR sensitivity of the HCG cantilever enables transmission IR spectroscopy with a Michelson interferometer. The HCG cantilever shows comparable signal to noise ratio to a low-end commercial FTIR system and exhibits a linear response to incident IR power. V C 2013 AIP Publishing LLC. [http://dx.

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Infrared imaging using arrays of SiO_2micromechanical detectors

Cited by 10 publications

References 13 publications

Al/SiOx/Al single and multiband metamaterial absorbers for terahertz sensor applications

Al/SiOx/Al single and multiband metamaterial absorbers for terahertz sensor applications

Optically read Coriolis vibratory gyroscope based on a silicon tuning fork

Large infrared absorptance of bimaterial microcantilevers based on silicon high contrast grating

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