Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array

Dong, Fengzhong; Zhang, Qingchuan; Chen, Dapeng; Miao, Zhengyu; Xiong, Zuhong; Li, Chaobo; Jiao, Binbin; Wu, Xiaoping

doi:10.1016/j.ultramic.2007.08.014

Cited by 16 publications

(21 citation statements)

References 15 publications

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“…Between them, the most important are bimaterial microcantilevers that mechanically respond to the absorp− tion of the radiation. These sensing structures were origi− nally invented at the Oak National Laboratory (ORNL) in the mid 1990's [11][12][13][14][15], and subsequently developed by ONRL [16][17][18][19][20], the Sarnoff Corporation [21,22], Sarcon Microsystems [23][24][25] and other for imaging [26][27][28][29][30][31][32][33] and photo spectroscopic applications [34,35].…”

Section: Thermomechanical Detector Approachmentioning

confidence: 99%

“…In dependence on readout techniques, the novel uncooled detectors can be devoted on: [13,15,17,19,20,[26][27][28][30][31][32][33], l piezoresistive [11,12], and l electron tunnelling [8]. …”

Section: Thermomechanical Detector Approachmentioning

confidence: 99%

“…Recently, a multi−fold interval metallized leg configura− tion has been proposed to increase sensitivity of optical− −readable bimaterial microcantilever array [32]. This multi− −fold configuration consists of alternatively connected un− metallized and metallized legs.…”

Section: Optically-coupled Cantileversmentioning

confidence: 99%

“…The high sensitivity of the cantilevers allows the individual pixels in the array to be shrunk from their current size of 50 μm to 20 μm while maintaining low−distortion IR imaging [25,40]. Considerable progress to reduce NEDT and time con− stant has been made in years by several research groups [20,25,[30][31][32][33]40,50,60,61,70,71]. Multispectral Imaging Inc. has developed a new class of electrically−coupled transdu− cers in which bending of the cantilever causes changing its capacitance.…”

Section: Novel Uncooled Focal Plane Arraysmentioning

confidence: 99%

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Novel uncooled infrared detectors

Rogalski

2010

Opto-Electronics Review

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Despite successful commercialization of uncooled microbolometers suitable for imaging, the community is still searching for a platform for imagers that combine affordability, convenience of operation, and excellent performance. More recently, a new type of uncooled detectors based on expansion phenomena in micromechanical structures has been introduced. These detectors are essentially free of intrinsic electronic noise and can be combined with a number of different readout techniques including: capacitive, piezoresistive, electron tunnelling, and optical. In this paper, their design structures and performance are discussed in more detail.

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Section: Thermomechanical Detector Approachmentioning

confidence: 99%

Section: Thermomechanical Detector Approachmentioning

confidence: 99%

Section: Optically-coupled Cantileversmentioning

confidence: 99%

Section: Novel Uncooled Focal Plane Arraysmentioning

confidence: 99%

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Novel uncooled infrared detectors

Rogalski

2010

Opto-Electronics Review

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“…The relationship between response time and air pressure, however, has not been mentioned yet. In this letter, after the successful fabrication of a substrate-free MEMS FPA [7], [8], the influence of air pressure on the FPA's performance was experimentally investigated, and a vacuum packaging technique was also developed.…”

Section: Introductionmentioning

confidence: 99%

Investigation on Performance and Vacuum Package of MEMS Infrared Focal Plane Arrays

Ou¹,

Li²,

Qu³

et al. 2013

IEEE Electron Device Lett.

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A substrate-free microelectromechanical system (MEMS) focal plane array (FPA) has been successfully developed. Since there is no silicon substrate beneath the FPA's pixels, the infrared radiation (IR) loss has been significantly reduced. However, at ambient pressure, it is difficult to obtain a clear visible image due to the sensitivity loss caused by the thermal conductance of air. To improve the packaged FPA's performance, its thermal sensitivity and response time were investigated under varying air pressure. The high-contrast IR thermal images of a human hand were captured at room temperature and under an air pressure of 0.01 Pa, and the noise-equivalent temperature difference of the FPA was also estimated to be about 373 mK compared with the 1.4 K under a pressure of 10 Pa. What is important is that the FPA's response time was increased from 50.1 to 336.6 ms by the decrease in air pressure. In addition, we present an approach to package the MEMS FPA at a low-pressure vacuum with two optical windows, which is an effective way to increase FPA's sensitivity.Index Terms-Focal plane array (FPA), microelectromechanical systems (MEMSs), response time, thermal sensitivity, uncooled, vacuum package.

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Performance of an optimized substrate-free focal plane array for optical readout uncooled infrared detector

Cheng

Zhang

Chen

et al. 2009

Journal of Applied Physics

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This note presents an optimized substrate-free focal plane array ͑FPA͒, which is implemented in an optical readout uncooled infrared ͑IR͒ detector. The supporting frame of such FPA is a temperature-variable one due to the large decreases in both the heat capacity and the thermal conductance. This brings a unique thermal characteristic: the supporting frame functions as a "thermal isolation" frame which reduces the thermal conductance and therefore increases the temperature change and also functions as a "thermal diffusion" frame which certainly results in the temperature prechange in the ones not absorbing IR radiation. This characterization could significantly increase the temperature change of microcantilevers and therefore improve the performance of the substrate-free FPA. In the proposed IR detector, the fabricated 160ϫ 160 FPA has an average noise equivalent temperature difference ͑NETD͒ and a response time of 330 mK and 16 ms, respectively. The performance of the IR detector theoretically increases by about 5.5 times compared with the one using a substrate FPA. Here, the geometry of the substrate FPA is just the same as the fabricated FPA, but the supporting frame is assumed to be a temperature-constant one. If the optical readout sensitivity can be increased enough using an enhanced IR absorber, the fabricated FPA thus has the potential to achieve a NETD value of 70 mK.

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Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array

Cited by 16 publications

References 15 publications

Novel uncooled infrared detectors

Novel uncooled infrared detectors

Investigation on Performance and Vacuum Package of MEMS Infrared Focal Plane Arrays

Performance of an optimized substrate-free focal plane array for optical readout uncooled infrared detector

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