Peculiar Relationship of Plume Brightness and Hard Layer Formation in Atmospheric-Pressure Plasma Jet Nitriding

Ichiki, Ryuta; Inoue, Takashi; Yoshimitsu, Yuki; Yamamoto, Hirofumi; Kanda, Seiichi; Yoshida, Minoru; Akamine, Shuichi; Kanazawa, Susumu

doi:10.1109/tps.2014.2311152

Cited by 7 publications

(3 citation statements)

References 3 publications

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“…Metal nitridation was employed as a surface-hardening technology [54]. A nitrided W surface may become hard, so it is compliant for nanoindentation measurement.…”

Section: Nanoindentationmentioning

confidence: 99%

Effects of nitrogen-seeded deuterium plasma on tungsten surfaces

Takamura

Aota²,

Uesugi

et al. 2019

Nucl. Fusion

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The melting and evaporation of target materials such as tungsten, due to the enormous plasma heat flux, are not compatible with the realization of ITER (International Thermonuclear Experimental Reactor) and nuclear fusion reactor designs. Nitrogen gas seeding has recently been considered as an effective radiator for edge and divertor boundary plasmas to protect the divertor plate from overheating. Although compatibility of nitrogen seeding with tokamak discharge operation was obtained in current tokamaks, the effects of nitrogen seeding on plasma-facing components, especially the divertor target material (e.g. tungsten), have not been fully tested in a fusion-relevant steady-state linear plasma system with a high plasma density and plasma heat flux, in which deuterium and nitrogen mixed-gas discharge plasmas are irradiated onto a tungsten target, closely similar to the boundary region in a magnetic fusion configuration. This study addressed such a detailed irradiation, using a variety of surface analyses. Surface-temperature-sensitive tungsten nitride formation was determined, thus elucidating the interesting surface morphology of whisker, loop, and/or hook-like nanostructures in some surface temperature bands. The surface characteristics were determined using several kinds of surface analysis methods, including x-ray diffraction, energy dispersive x-ray analysis, nanoindentation, Raman spectroscopy, and spectrometry. The possibility of tungsten contamination into facing plasmas is discussed in terms of tungsten nitride melting. The relation to industrial applications of tungsten nitride has also been mentioned.

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“…Metal nitridation was employed as a surface-hardening technology [54]. A nitrided W surface may become hard, so it is compliant for nanoindentation measurement.…”

Section: Nanoindentationmentioning

confidence: 99%

Effects of nitrogen-seeded deuterium plasma on tungsten surfaces

Takamura

Aota²,

Uesugi

et al. 2019

Nucl. Fusion

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“…Atmospheric pressure plasmas (APPs) have attracted significant attention as plasmas that can be generated in the atmosphere; thus, their applications are expected to be used in various fields, such as physics [1][2][3][4][5][6][7], medicine [8][9][10][11], biology [12][13][14][15][16][17], and engineering [18][19][20][21][22][23][24][25][26][27]. In particular, an APP jet (APPJ), which is a jet-like plasma injected from the tip aperture of a tube nozzle under atmospheric pressure [28,29], has recently been applied to surface material processing and modification.…”

Section: Introductionmentioning

confidence: 99%

Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope

Yamamoto

Nakazawa

Oginö

et al. 2021

J. Micromech. Microeng.

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We developed a localized plasma-enhanced chemical vapor deposition (PE-CVD) technique to deposit silicon oxide with a sub-micrometer width on a substrate using an atmospheric pressure plasma jet (APPJ) irradiated from a nanopipette nozzle. To realize fine material deposition, hexamethyldisiloxane (HMDSO) vapor was blown into the localized helium APPJ irradiated from the sub-micrometer aperture of the nanpopipette with the jet length limited to the aperture size of the nanopipette. The irradiation distance was controlled using a shear-force positioning technique using scanning probe microscopy (SPM). The proposed system successfully deposited silicon oxide dots with sub-micrometer width on a substrate. After the deposition, the topography of the deposited surface was observed by scanning the nanopipette, which can be used as an SPM probe. The localized PE-CVD properties were systematically investigated by varying the deposition parameters. The amount of deposited material could be controlled by the flow rate of the carrier gas of the HMDSO vapor, APPJ irradiation time, and nanopipette–substrate surface irradiation distance.

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“…On the other hand, we have been developing original nitriding techniques by utilizing atmospheric-pressure plasmas. [18][19][20][21][22][23][24][25][26][27][28] For example, we have achieved surface nitriding of tool steel, [18][19][20][21] stainless steel, 22) and titanium alloy 23,24) with a pulsed-arc (PA) plasma jet. In addition, several groups have proved that dielectric barrier discharge enables the nitriding of steel.…”

Section: Introductionmentioning

confidence: 99%

Bright nitriding using atmospheric-pressure pulsed-arc plasma jet based on NH emission characteristics

Toda¹,

Ichiki²,

Kanbara³

et al. 2020

Jpn. J. Appl. Phys.

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Bright nitriding of a steel surface is demonstrated by an atmospheric-pressure pulsed-arc plasma jet, keeping the original metallic luster and low roughness. As the hydrogen fraction in the nitrogen-hydrogen gas mixture increases, the optical emission intensity of NH radicals decreases. Following this fact, we examine a method to suppress the formation of a compound layer, in which the hydrogen fraction increases from the conventional value of 1% to larger values for suppressing excess nitrogen supply. The hydrogen fraction of 4% provides a nitrided surface without a compound layer, where surface reflectance is largest and surface roughness is lowest. However, the nitriding treatment produces a dark spot several millimeters in diameter at the sample center due to local oxidization.

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Peculiar Relationship of Plume Brightness and Hard Layer Formation in Atmospheric-Pressure Plasma Jet Nitriding

Cited by 7 publications

References 3 publications

Effects of nitrogen-seeded deuterium plasma on tungsten surfaces

Effects of nitrogen-seeded deuterium plasma on tungsten surfaces

Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope

Bright nitriding using atmospheric-pressure pulsed-arc plasma jet based on NH emission characteristics

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