PDMS Microcantilever-Based Flow Sensor Integration for Lab-on-a-Chip

Nezhad, Amir Sanati; Ghanbari, Mahmood; Agudelo, Carlos G.; Packirisamy, M.; Bhat, Rama; Geitmann, Anja

doi:10.1109/jsen.2012.2223667

Cited by 65 publications

(36 citation statements)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The boundary condition that is applied to the cantilever is fixed constraint on the side wall of the channel. The linear elastic model is chosen to simulate the behavior of the PDMS cantilever with Young's modulus of 802 kPa, Poisson ratio of 0.45 and density of 965 kg/m 3 [14].…”

Section: Cantilever Simulation Setupmentioning

confidence: 99%

See 1 more Smart Citation

Design and study of mini wind tunnel for microsystems fluid interaction under low Reynolds number flows

et al. 2020

View full text Add to dashboard Cite

This paper discusses details of design and fabrication of a simple open-loop modular mini wind tunnel for studying fluid microstructure interaction under low Reynolds number. A simple open-loop modular mini wind tunnel was designed and built after examining various design possibilities. The mini wind tunnel consists of five basic sections, namely wideangle diffuser, settling chamber, contraction section, test section and exit diffuser. The settling chamber consists of flow straighter made from array of circular tubes. Mini wind tunnel is powered by incorporating a fan which provides air flow with Re < 1500. Flow behavior inside the mini wind tunnel, particularly test section, was investigated by performing flow simulation using COMSOL finite element modeling. Additionally, smoke experiments confirm streamline flow inside the test section. Fluid interaction of microcantilevers was investigated using the designed mini wind tunnel. Polydimethylsiloxane microcantilever beam of different aspect ratios was fabricated and tested for airflow sensing applications. Microcantilevers are placed normal to fluid flow and steady tip deflection.

show abstract

Section: Cantilever Simulation Setupmentioning

confidence: 99%

“…The microcantilevers were made of polydimethylsiloxane (PDMS). Ratio of 10:1 of base to curing agent is used to achieve the desired material property [14]. Once the base was mixed with the curing agent, it was placed in a vacuum seal container to get rid of any bubbles during mixing.…”

Section: Microcantilever Study In Wind Tunnelmentioning

confidence: 99%

Design and study of mini wind tunnel for microsystems fluid interaction under low Reynolds number flows

et al. 2020

View full text Add to dashboard Cite

show abstract

“…A multilayer soft lithography process is developed to fabricate a thin PDMS layer involving the PDMS microcantilever and the micro-fluidics network. [18]. A highly-integrated DNA detection SoC, where several kinds of cantilever DNA sensors, a readout circuit, an MCU, voltage regulators, and a wireless transceiver, are integrated by monolithically CMOS Bio-MEMS [19].…”

Section: Biodetection Applications Of Microcantilever Based Biosementioning

confidence: 99%

Microcantilever based Biosensor for Disease Detection Applications

Gopinath¹,

Anitha²,

Mastani³

2015

JOMB

View full text Add to dashboard Cite

The fast development of micro-electromechanical system (MEMS) technology has brought many great ideas in the field of biomedical applications. A biosensor is a chemical sensing device in which a biologically derived recognition analyte coupled to a transducer to allow the quantitative development of biochemical parameter. A biosensor consists of a bio-element and a sensor-element. The bio-element may be an enzyme, antibody, living cells, tissue, etc., and the sensing element may be electric current, electric potential, and so on and specificity of analyte is the important concept in biosensor. In this paper we review the principle of microcantilever, biosensing mechanism and applications of microcantilevers for bio detection for early detection of diseases accurately. Biosensors can have a variety of biomedical, industry, and military applications. The main advantages of MEMS based sensors are specificity, portability, simplicity, high sensitivity, potential ability for real-time and on-site analysis coupled with the high speed and low cost.

show abstract

“…The primary microfluidic-integrable flow sensors are micro electromechanical systems (MEMS)-based sensors with high-resolution sensing performance. However, the MEMS flow sensors have the constraint in complexity of fabrication processes and the drawback of contact-based measurement 23 , 24 . Other types of integrable flow sensors are thermal anemometers 25 , optical devices 26 , and electrical admittance sensors 27 .…”

Section: Introductionmentioning

confidence: 99%

Noncontact and Nonintrusive Microwave-Microfluidic Flow Sensor for Energy and Biomedical Engineering

Zarifi

Saberi

Hejazi

et al. 2018

Sci Rep

135

View full text Add to dashboard Cite

A novel flow sensor is presented to measure the flow rate within microchannels in a real-time, noncontact and nonintrusive manner. The microfluidic device is made of a fluidic microchannel sealed with a thin polymer layer interfacing the fluidics and microwave electronics. Deformation of the thin circular membrane alters the permittivity and conductivity over the sensitive zone of the microwave resonator device and enables high-resolution detection of flow rate in microfluidic channels using noncontact microwave as a standalone system. The flow sensor has the linear response in the range of 0-150 µl/min for the optimal sensor performance. The highest sensitivity is detected to be 0.5 µl/min for the membrane with the diameter of 3 mm and the thickness of 100 µm. The sensor is reproducible with the error of 0.1% for the flow rate of 10 µl/min. Furthermore, the sensor functioned very stable for 20 hrs performance within the cell culture incubator in 37 °C and 5% CO 2 environment for detecting the flow rate of the culture medium. This sensor does not need any contact with the liquid and is highly compatible with several applications in energy and biomedical engineering, and particularly for microfluidic-based lab-on-chips, micro-bioreactors and organ-on-chips platforms.Microfluidic techniques have been extensively used for efficient manipulation of fluid flow in microscale for biomedical research and analytical chemistry. The control of flow in microfluidic networks is crucial for cell sorting, cell collection, flow mixing, cell adhesion and culture, droplet manipulation and flow driving 1 . Moreover, the flow rate needs to be accurately quantified to determine the concentration of cells 2 , and production of hollow microspheres . A slight change in flow rate may lead to a size variation in the products. To precisely handle fluids at the microscale, the real-time detection of flow rate in microfluidic environment is essential and urgently needed though challenging.Organ-on-a-chip (OOC) technology, in particular, aims to build biomimetic in vitro physiological micro-organs to compliment animal models in biological systems and benefit the pharmaceutical industry for drug discovery 7,8 . Many groups including ours have developed OOC platforms made of microbioreactors and integrated sensors for long-term and real-time monitoring the microenvironment, screening the status of miniaturized organs, and characterizing the response of micro-tissues to drugs [9][10][11][12][13] . The real-time measurement of heat transfer 14 , differential pressure 15 , pH and oxygen 11 and biomarkers 10 are central to biomimetic performance of OOC systems. Miniaturized biosensors provide favorable features like low-cost reagents consumption, decreased processing time, reduced sample volume, laminar flow to cells, parallel detection for multiple samples as well as portability 12,13,16 . However, the OOC systems still need on-chip integrated flow sensors compatible with their fabrication processes and functions 17. The OOC platforms require the...

show abstract

PDMS Microcantilever-Based Flow Sensor Integration for Lab-on-a-Chip

Cited by 65 publications

References 26 publications

Design and study of mini wind tunnel for microsystems fluid interaction under low Reynolds number flows

Design and study of mini wind tunnel for microsystems fluid interaction under low Reynolds number flows

Microcantilever based Biosensor for Disease Detection Applications

Noncontact and Nonintrusive Microwave-Microfluidic Flow Sensor for Energy and Biomedical Engineering

Contact Info

Product

Resources

About