Patterns of microwave modification of semiconductor thin film structures

Abstract

The present paper concerns heating, annealing and redoping of semiconductor layered structures using a micro wave radiator with a micron-sized aperture. We proposed a variant of such a modifier that is based on a conical coaxial waveguide. The study is focused on localization of heat and specific spatiotemporal distribution of temperature depending on the electrical and thermal parameters of the objects under study. 3AKOHOMEPHOCT� CBLI MO.QVI<I>VlKAUVIVI nOIlynpOBO.QHVlKOBbIX TOHKOnIlEHOLlHblX CTPYKTYP rOp,ll, VleHKO 10. E., CnVln4eHKo H. 111 ., noneTaes,Q. A, npoKa3a AM., nS'lTaIll KVlHa M. 111 . XapbKoecKuO Hau,uoHanbHblO YHueepcumem paouo3neKmpoHuKu c. AHHOmal.\UR -B pa60Te VlccneAYIOTC51 oco6eHHOCTVI HarpeBa, OT>KVlra VI nepenerVipOBaHVl5I nonynpoBoAHVlKOBblX cnOVlCTblX CTPYKTYP npVl nOMOLll VI CB4 Vl3nY4aTene� c MVlKpopa3MepHO� anepTYpo�. npeAnO>KeH BapVlaHT TaKora MOAVlcj:JVlKaTopa Ha OCHOBe KO HYCHoro KoaKCVlanbHoro BonHOBOAa. OCHOBHoe BHVlMaHVle YAen5leTC51 nOKanVl3a4V1V1 TennOBbiAeneHVl5I VI cne4V1cj:JVlKe npOCTpaHCTBeHHO BpeMeHHora pacnpeAeneHVl5I TeMnepaTypbl B 3aBVlCVlMOCTVI OT 3neKTpVl4eCKVlX VI TennOBblX napaMeTpOB o6beKTOB VlccneAOBaHVl5I.

Microwave micromodifier power mode optimization for microtechnologies

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