Microwave micromodifier power mode optimization for microtechnologies

Abstract

The present paper concerns theoretically investigated features of spatiotemporal establishment of the temperature at the local high microwave heating of semiconductor object using a near-field micromodifier. We propose a method that partially allows withdrawing a problem of the required temperature and locality retention through by means of the combined pulsed microwave power supply of the micromodifier. onTVlMVl3AUVl� PE>K�MA n�TAHVI� CB4 M�KPOMO.Q�CI>�KATOPA B M�KPOTEXHOIlOr��X rOPAl!1eHKO 10. E., napKI!1H C. 10., Cnl!1nYeHKO H. 111 ., �ep6aK E. n. XapbKoecKuO Hau,uoHanbHblO YHueepcumem paouo3neKmpoHuKu np.