Passive mode-locking of a large volume tea-CO2 laser using an unstable resonator configuration

Lavigne, Pierre; Gilbert, J.; Lachambre, J. L.

doi:10.1016/0030-4018(75)90212-6

Cited by 24 publications

(3 citation statements)

References 6 publications

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“…Intra−cavity Q−switch− ing was realized in the past by electro−optic modulation [40], acousto−optic modulation [64], by using saturable ab− sorbers [65] or by opto−mechanical means [66,67]. Passive mode−locking was achieved in a past using some form of saturable absorbers, gaseous [68] or solid−state [69], and active mode−locking of hybrid TEA laser was achieved using intra−cavity Ge acousto−optic modulator [70]. Extra− −cavity techniques are similar to intra−cavity ones with res− pect to the modulators used.…”

Section: Robust Generation Of Short Pulses For Lppmentioning

confidence: 99%

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

Nowak

Ohta

Suganuma

et al. 2013

Opto-Electronics Review

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It was shown both theoretically and experimentally that nanosecond order laser pulses at 10.6 micron wavelength were superior for driving the Sn plasma extreme ultraviolet (EUV) source for nano-lithography for the reasons of higher conversion efficiency, lower production of debris and higher average power levels obtainable in CO2 media without serious problems of beam distortions and nonlinear effects occurring in competing solid-state lasers at high intensities. The renewed interest in such pulse format, wavelength, repetition rates in excess of 50 kHz and average power levels in excess of 18 kiloWatt has sparked new opportunities for a matured multi-kiloWatt CO2 laser technology. The power demand of EUV source could be only satisfied by a Master-Oscillator-Power-Amplifier system configuration, leading to a development of a new type of hybrid pulsed CO2 laser employing a whole spectrum of CO2 technology, such as fast flow systems and diffusion-cooled planar waveguide lasers, and relatively recent quantum cascade lasers. In this paper we review briefly the history of relevant pulsed CO2 laser technology and the requirements for multi-kiloWatt CO2 laser, intended for the laser-produced plasma EUV source, and present our recent advances, such as novel solid-state seeded master oscillator and efficient multi-pass amplifiers built on planar waveguide CO2 lasers.

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Section: Robust Generation Of Short Pulses For Lppmentioning

confidence: 99%

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

Nowak

Ohta

Suganuma

et al. 2013

Opto-Electronics Review

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“…The best performance has been obtained from bleachable dyes in either dye lasers (5,6) or pulsed solid-state lasers (2,7,8), such as ruby or neodymum. For mid-infrared lasers such as C02, doped germanium (9) or gaseous mixtures (10) have been employed, with much less success however. Passive mode locking of ultraviolet lasers (like excimer lasers) has also been achieved from liquid solutions (1 l), although the resulting pulse durations are orders of magnitude longer than the theoretical limit defined by the inverse of the laser linewidth.…”

Section: Introductionmentioning

confidence: 99%

Passive mode locking with a nonlinear Michelson interferometer: transient and steady-state characteristics

Ouellette¹,

Piché²

1988

Can. J. Phys.

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The insertion of a nonlinear medium into one arm of a Michelson interferometer used as a mirror in a laser cavity is shown to produce intensity-dependent losses. The resulting nonlinearity yields passive mode locking since it favors the oscillation of an intense short pulse. The method is analyzed and compared with passive mode locking with a saturable absorber. The duration of the short pulse circulating in the laser cavity is shown to be ultimately limited by the linewidth of the gain curve. Experimental resu!ts obtained with a transversely excited atmospheric -C 0 2 laser illustrate some aspects of the dynamic behaviour of a iaser equipped with such a device.On montre que l'insertion d'un matCriel nonlinCaire dans un bras d'un interftromktre de Michelson servant de miroir dans une cavitt laser introduit des pertes qui dipendent de I'intensitC du rayonnement. Cette non-linkaritt cause la synchronisation passive des modes laser puisqu'elle favorise ]'emergence d'une impulsion breve intense. On analyse cette mCthode et on compare sa performance a la synchronisation passive des modes laser au moyen d'un absorbant saturable. On montre que la durCe minimale de I'impulson brkve circulant dans la cavitC laser est limitke par la largeur de la courbe de gain du milieu actif. Des rtsultats exptrimentaux obtenus avec un laser TEA-C02 illustrent certains aspects du comportement dynamique d'un laser muni d'un tel dispositif.

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“…The use of saturable absorbers to passively mode-lock many solid state and dye lasers is now a well proven, reliable technique capable of yielding reproducible pulse trains with individual pulses having a typical duration of a few picoseconds. In early experiments with TEA C0 2 lasers a similar approach was adopted, and the genera tion of mode-locked pulse trains was reported by several authors who used molecular gases (Nurmikko et al 1971;Fortin et al 1973;Lavigne 1975), hot C p-type germanium (Gibson et al 1974) as the saturable absorber medium. From the point of view of short pulse generation, the ca.…”

Section: Introductionmentioning

confidence: 99%

Ultra-short pulse generation with CO ₂ lasers

Alcock

Corkum

1980

Phil. Trans. R. Soc. Lond. A

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Although considerable progress has been made, and several methods now permit the generation of 10 pm pulses in the picosecond range, mode-locked CO 2 oscillators do not appear to have reached their full potential. Two techniques, passive and injection mode-locking, have been used to generate pulses shorter than 100 ps and of these injection mode-locking seems to be particularly well suited to CO 2 oscillators since it is less sensitive to the short gain lifetime and rapid gain risetime of multi-atmosphere discharges. To date, no attempt to use both techniques simultaneously has been reported for CO 2 although this approach has been applied successfully to Nd: YAG oscillators (Murray & Lowdermilk 1978). Injection mode-locking is clearly a valuable tool for the study of pulse broadening mechanisms as a function of the operating pressure of the slave laser and the intensity, duration and wavelength of the injected pulses. Such investigations are of fundamental importance to the further development of ultra-short pulse CO 2 oscillators and amplifiers, and may well lead to the routine generation of pulses as short as 10 ps.

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Passive mode-locking of a large volume tea-CO2 laser using an unstable resonator configuration

Cited by 24 publications

References 6 publications

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

Passive mode locking with a nonlinear Michelson interferometer: transient and steady-state characteristics

Ultra-short pulse generation with CO ₂ lasers

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Passive mode-locking of a large volume tea-CO2 laser using an unstable resonator configuration

Cited by 24 publications

References 6 publications

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

Passive mode locking with a nonlinear Michelson interferometer: transient and steady-state characteristics

Ultra-short pulse generation with CO 2 lasers

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Ultra-short pulse generation with CO ₂ lasers