Parylene-C as a piezoelectric material

Kim, Justin Young-Hyun; Cheng, Austin; Tai, Yu‐Chong

doi:10.1109/memsys.2011.5734464

Cited by 29 publications

(33 citation statements)

References 11 publications

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“…Indeed, Parylene C has recently been found to be a useful piezoelectric material. 22 This also supports the earlier hypothesis, that a good substrate for graphene should not have oxygen or any other strongly electronegative atoms in its chemical formula. 23 For some devices, we have performed annealing in an inert atmosphere at 250 C in order to produce a possible improvement in the transport properties.…”

Section: à2supporting

confidence: 86%

Encapsulation of graphene in Parylene

Skoblin

Sun

Yurgens

2017

Applied Physics Letters

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Graphene encapsulated between flakes of hexagonal boron nitride (hBN) demonstrates the highest known mobility of charge carriers. However, the technology is not scalable to allow for arrays of devices. We are testing a potentially scalable technology for encapsulating graphene where we replace hBN with Parylene while still being able to make low-ohmic edge contacts. The resulting encapsulated devices show low parasitic doping and a robust Quantum Hall effect in relatively low magnetic fields <5 T. Published by AIP Publishing. [http://dx

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Section: à2supporting

confidence: 86%

Encapsulation of graphene in Parylene

Skoblin

Sun

Yurgens

2017

Applied Physics Letters

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“…PVDF film, after stretch-poling, needs to be bonded to substrate for further fabrication and it lacks high temperature stability. In comparison, considering the combined mechanical properties, chemical inertness, high temperature stability and bio-compatibility, Parylene-C (PA-C, (Figure 1), i.e., ortho-chloro-p-xylene), with a piezoelectricity of -3.0pC/N for d 33 [3], is an interesting piezoelectric material for MEMS acoustic and vibrational transducers. We previously reported the first measurement of the piezoelectricity of PA-C [3].…”

Section: Principle and Designmentioning

confidence: 99%

“…In comparison, considering the combined mechanical properties, chemical inertness, high temperature stability and bio-compatibility, Parylene-C (PA-C, (Figure 1), i.e., ortho-chloro-p-xylene), with a piezoelectricity of -3.0pC/N for d 33 [3], is an interesting piezoelectric material for MEMS acoustic and vibrational transducers. We previously reported the first measurement of the piezoelectricity of PA-C [3]. Here, we demonstrated the first piezoelectric PA-C based MEMS microphone with a diaphragm 6mm in diameter and 30µm in thickness.…”

Section: Principle and Designmentioning

confidence: 99%

Piezoelectric Parylene-C MEMS microphone

Kim

Liu

Scianmarello

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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There has long been a strong interest in the use of thin-film piezoelectric materials for MEMS microphones and actuators. However, well-known thin-film piezoelectric materials all have different degrees of technological difficulties for MEMS integration. Here, we demonstrated the first piezoelectric Parylene-C (PA-C) based MEMS microphone with a diaphragm 6mm in diameter and 30µm in thickness. The dynamic range spans from less than 30 dB to above 110 dB SPL and the open-circuit sensitivity is 1 -110 µV/Pa over an audio frequency 1 -10 kHz. The total harmonic distortion of the device is less than 20% at 110 dB SPL and 1 kHz.

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“…We used a quadratic element in the FEM analysis, and 4257 and 1089 elements for the 10-and 2-μm-stack-width models, respectively. The piezoelectric coefficients of the parylene used in the simulation were taken from Reference [9], and the coefficients depend on the electric field. The permittivity was 2.74 × 10 −11 F/m.…”

Section: Wiring Designmentioning

confidence: 99%

“…Then, parylene can be used as a piezoelectric material [8]. A fabrication technology for vertical nano-sheets of SiO 2 /Au embedded into PDMS has already been developed [9]. Therefore, we propose stacking the actuator by using vertical nano-sheets with parylene placed between the sheets.…”

Section: Introductionmentioning

confidence: 99%

Design of a Nano-Displacement No-Wiring Solid Actuator

Sone

Jalabert

Fujita

2013

JCST

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In this paper, we considered a polymer-based piezoelectric stack actuator based on MEMS nano-positioning technology. A no-wiring structure was used for simplicity of fabrication and to avoid irregularity deformation under wiring. We selected the key parameters for actuation design, and a simulation was executed through FEM analysis of the electric field and deformation. From this simulation, we decided upon the appropriate parameters of the actuator.

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Parylene-C as a piezoelectric material

Cited by 29 publications

References 11 publications

Encapsulation of graphene in Parylene

Encapsulation of graphene in Parylene

Piezoelectric Parylene-C MEMS microphone

Design of a Nano-Displacement No-Wiring Solid Actuator

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