1996
DOI: 10.1007/bf01567883
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Parametric dependence of the properties of pulsed-laser-deposited diamond-like carbon films

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Cited by 8 publications
(3 citation statements)
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“…3 also shows that for normal-plane samples, the laser fluence also contributes to the sp 3 content. The effects of laser wavelength and fluence on the sp 3 content are in agreement with other reports [2,3,13]. It is noted that these two laser parameters are closely related to the production of ionized carbon species with sufficient kinetic energy that enables the subplantation formation [12] of DLC.…”
Section: Raman Spectrasupporting
confidence: 89%
See 1 more Smart Citation
“…3 also shows that for normal-plane samples, the laser fluence also contributes to the sp 3 content. The effects of laser wavelength and fluence on the sp 3 content are in agreement with other reports [2,3,13]. It is noted that these two laser parameters are closely related to the production of ionized carbon species with sufficient kinetic energy that enables the subplantation formation [12] of DLC.…”
Section: Raman Spectrasupporting
confidence: 89%
“…With some optimized parameters, which include the laser wavelength, laser fluence, and high vacuum, the amorphous diamond-like carbon (DLC) thin film is obtained [1][2][3][4][5][6][7]. This deposition arrangement is generally known as the on-axis, or the normal-plane pulsed laser deposition (n-PLD), which usually promise a relatively smooth and particulate-free thin film.…”
Section: Introductionmentioning
confidence: 99%
“…is [20][21][22][23][24][25]. A fémek szubmikroméretes megmunkálásánál azonban nehézségek merültek fel, ugyanis a ns-os idıtartományhoz tartozó hıdiffúziós hossz meghaladja a mikrométer nagyságrendet, emellett jelentékeny mechanikai károsulás is jelentkezett a céltárgy felületén, meghiúsítva ezzel a precíz felületkezelést [26][27][28].…”
Section: Az Ultrarövid Impulzusok éS Anyag Kölcsönhatásaunclassified