Target-plane deposition of diamond-like carbon in pulsed laser ablation of graphite

Yap, Seong Shan; Tou, Teck Yong

doi:10.1016/j.apsusc.2007.06.032

Cited by 7 publications

(1 citation statement)

References 25 publications

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“…Materials growth was explained by deposition of flux with arbitrarily chosen incidence angle, vapor condensation followed by shadowing, and surface diffusion processed that finally results in preferential structural growth. Micro-and nanostructures were also detected in our earlier work when the substrates were placed directly on the target surface where deposition relying mostly on backward scattered plume [20]. In the current configuration, forward directed plasma plume arrived at = 0 ∘ effective angle (plasma plume is parallel to the substrate) onto the substrate almost immediately after plume generation and expansion for sample C0 as the substrate was positioned 5 mm from the target.…”

Section: Discussionsupporting

confidence: 59%

Nanostructured Diamond‐Like Carbon Films Grown by Off‐Axis Pulsed Laser Deposition

Yap

Nee

Yap

et al. 2015

Journal of Nanomaterials

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Nanostructured diamond-like carbon (DLC) films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off-axis position. The configuration utilized high density plasma plume arriving at low effective angle for the formation of nanostructured DLC. Nanostructures with maximum size of 50 nm were deposited as compared to the ultrasmooth DLC films obtained in a conventional deposition. The Raman spectra of the films confirmed that the films were diamond-like/amorphous in nature. Although grown at an angle, ion energy of >35 eV was obtained at the off-axis position. This was proposed to be responsible for subplantation growth of sp3hybridized carbon. The condensation of energetic clusters and oblique angle deposition correspondingly gave rise to the formation of nanostructured DLC in this study.

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Section: Discussionsupporting

confidence: 59%