Packageless temperature sensor based on AlN/IDT/ZnO/Silicon layered structure

Legrani, Ouarda; Elmazria, O.; Elhosni, Meriem; Bartasyte, Ausrine; Pigeat, P.; Zghoon, S.

doi:10.1109/eftf-ifc.2013.6702265

Cited by 6 publications

(4 citation statements)

References 10 publications

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“…Because surface acoustic wave devices (SAW) exhibit a high sensitivity to various physical and chemical parameters, they offer innovative and very promising solutions in a wide range of sensing applications [1][2][3]. In addition to being small, simple and robust, these devices have the advantage of being passive (batteryless), remotely queried (wireless), packageless (when needed), and inexpensive if they are fabricated at a large scale [4][5][6][7]. Their use as passive and wireless sensors allows them to operate in rotating parts or in extreme conditions such as high temperature (up to 1000°C) or radioactive environments, in which no other wireless sensor can operate [8,9].…”

Section: Introductionmentioning

confidence: 99%

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Elhosni

Elmazria

Petit-Watelot

et al. 2016

Sensors and Actuators A: Physical

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This study describes the numerical implementation of accurate and fully coupled physical models in order to investigate the sensitivity of Surface Acoustic Wave (SAW) devices using the magnetoelastic interaction with an external magnetic field. The model was first validated using experimental data previously published by Kadota et al., obtained with SAW resonators based on quartz substrates and nickel InterDigital Transducers (IDTs). The model was then used to optimize the geometry of a new magnetostrictive-piezoelectric layered structure (Ni/ZnO/IDT/LiNbO3), regarding its sensitivity to the magnetic field intensity. The optimized structure was designed and fabricated and experimental results show a good correlation with the numerical modeling. Simulations also show that if alumina is used instead of ZnO, the Ni/Al2O3/IDT/LiNbO3 structure exhibits a sensitivity that is 9 times higher than the one based on ZnO.

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Section: Introductionmentioning

confidence: 99%

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Elhosni

Elmazria

Petit-Watelot

et al. 2016

Sensors and Actuators A: Physical

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“…The most important properties of the results (such as frequency response variation with thickness increase) obtained from the simulation model [16,17] adequately reflect the characteristics of the in-situ measured structure. However, we cannot deny the obvious differences.…”

Section: Study Of a Thick Layer Deposition Processmentioning

confidence: 86%

“…The detailed description of the modeling approaches and modeling data comparison to experimental data is given in Ref. [16]. Fig.…”

Section: Study Of a Thick Layer Deposition Processmentioning

confidence: 99%

Monitored vacuum deposition of dielectric coatings over surface acoustic wave devices

Zhgoon

Shvetsov

Bhattacharjee

et al. 2015

Vacuum

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“…Compared with traditional piezoelectric materials, including LiNbO 3 , LiTaO 3 and quartz with maximum working temperature much lower than 600 • C, AlN is very promising for the fabrication of high temperature sensors because it remains stable at 1000 • C [4]. There have been reports of AlN-based SAW temperature sensors on Si [5,6], sapphire [7,8], and silicon carbide [9,10], but AlN/sapphire-based sensors have attracted the most attention because of their good thermal stability, high acoustic velocity, high quality factor (Q) and low cost. Until now, most studies have focused on improving the working temperature of AlN-based SAW sensors [11][12][13]; however, the basic performance of these sensors still requires further improvement for their commercialization.…”

Section: Introductionmentioning

confidence: 99%

An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

Huang

et al. 2021

Micromachines

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The impact of device parameters, including AlN film thickness (hAlN), number of interdigital transducers (NIDT), and acoustic propagation direction, on the performance of c-plane AlN/sapphire-based SAW temperature sensors with an acoustic wavelength (λ) of 8 μm, was investigated. The results showed that resonant frequency (fr) decreased linearly, the quality factor (Q) decreased and the electromechanical coupling coefficient (Kt2) increased for all the sensors with temperature increasing from −50 to 250 °C. The temperature coefficients of frequency (TCFs) of sensors on AlN films with thicknesses of 0.8 and 1.2 μm were −65.57 and −62.49 ppm/°C, respectively, indicating that a reduction in hAlN/λ favored the improvement of TCF. The acoustic propagation direction and NIDT did not obviously impact the TCF of sensors, but they significantly influenced the Q and Kt2 of the sensors. At all temperatures measured, sensors along the a-direction exhibited higher fr, Q and Kt2 than those along the m-direction, and sensors with NIDT of 300 showed higher Q and Kt2 values than those with NIDT of 100 and 180. Moreover, the elastic stiffness of AlN was extracted by fitting coupling of modes (COM) model simulation to the experimental results of sensors along different directions considering Euler transformation of material parameter-tensors. The higher fr of the sensor along the a-direction than that along the m-direction can be attributed to its larger elastic stiffness c11, c22, c44, and c55 values.

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Packageless temperature sensor based on AlN/IDT/ZnO/Silicon layered structure

Cited by 6 publications

References 10 publications

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Monitored vacuum deposition of dielectric coatings over surface acoustic wave devices

An Experimental and Theoretical Study of Impact of Device Parameters on Performance of AlN/Sapphire-Based SAW Temperature Sensors

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