P2G-4 Suppression of Acoustic Energy Leakage in FBARs with Al Bottom Electrode: FEM Simulation and Experimental Results

Ohara, Ryoichi; Yanase, Naoko; Yasumoto, Takaaki; Kawase, M.; Masuko, S.; Ohno, Tetsuya

doi:10.1109/ultsym.2007.417

Cited by 7 publications

(2 citation statements)

References 13 publications

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“…It was observed in the past that the dominant loss mechanism near the antiresonance frequency is acoustic propagation of power away from the resonator area (active area) to peripheral areas (passive area). 1,3,4) To the best of the authors' knowledge, no quantitative discussion has been made on this loss mechanism.…”

Section: Introductionmentioning

confidence: 99%

Quantitative Analysis of Power Leakage in an Film Bulk Acoustic Resonator Device at the Antiresonance Frequency

Thalmayr¹,

Hashimoto²,

Ueda

et al. 2010

Jpn. J. Appl. Phys.

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In this paper we analyze for the first time quantitatively the acoustic losses in a film bulk acoustic wave resonator (FBAR), which are expected to deteriorate the device performance. To this end, we regard the effective acoustic admittance, conduct laser probing measurements and finite element modeling (FEM). For our device under test (DUT) at the anti-resonance frequency, we compare the relative power of observable modes in the active and passive area and point out the relevant energy loss mechanism in terms of a single mode. By scattering analysis of the resonator's border region, we can identify the respective excitation mechanism within the active area and therefore can consider specific countermeasures to improve the device performance. Practically applied for the first time, the utilized methods and the overall procedure are explained in detail and are applicable to investigate acoustic energy loss as well at other frequencies as in other devices.

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Section: Introductionmentioning

confidence: 99%

Quantitative Analysis of Power Leakage in an Film Bulk Acoustic Resonator Device at the Antiresonance Frequency

Thalmayr¹,

Hashimoto²,

Ueda

et al. 2010

Jpn. J. Appl. Phys.

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“…armonic and modal analysis by the finite element method (FEM) can be used for an accurate simulation of acoustic wave resonators, such as film bulk acoustic resonators (FBARs) and contour mode resonators. [1][2][3][4][5] It is possible to predict eigenmodes and the electrical device response, and it is even possible to analyze energy leakage paths. 6) However, for the parametric analysis and design of the entire real resonator device possibilities are limited, owing to the fact that FEM model complexity and the number of degrees of freedom (DOF) increase markedly and soon reach both the limit of available calculation resources and license limitations of commercial FEM software.…”

mentioning

confidence: 99%

Simplified Boundary Modeling for Resonating Structures by Scattering Analysis

Thalmayr¹,

Hashimoto²,

Ueda

et al. 2011

Jpn. J. Appl. Phys.

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In this paper, we discuss a simplified boundary modeling for numerical simulation of complex real resonator devices by prior scattering analysis. Appropriate boundary conditions are a crucial factor for accurate simulation of resonator devices. We propose to analyze the scattering of propagating eigenmodes at the substrate-to-membrane anchor of the resonating structure and show that model simplification is feasible, provided that the backscattered energy at the anchor/substrate boundary is small and the contribution of energy tunneling by evanescent modes is negligible. Exemplarily, we analyze the model of a film bulk acoustic resonator (FBAR).

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A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

2013

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P2G-4 Suppression of Acoustic Energy Leakage in FBARs with Al Bottom Electrode: FEM Simulation and Experimental Results

Cited by 7 publications

References 13 publications

Quantitative Analysis of Power Leakage in an Film Bulk Acoustic Resonator Device at the Antiresonance Frequency

Quantitative Analysis of Power Leakage in an Film Bulk Acoustic Resonator Device at the Antiresonance Frequency

Simplified Boundary Modeling for Resonating Structures by Scattering Analysis

A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

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