P‐53: New TPS Function for Identifying Nano‐Scale Organic Film Phase in Large‐Size AMOLED Deposition Processes using Belt Source Evaporation Techniques

Abstract

New TPS(Temperature Programmed Sublimation) technology has been developed in order to deploy to the belt source evaporation for large-size AMOLED deposition processes. When the organic film deposit on the metal plate, we have found it has nano-scale film phase and bulk phase for the first time. The film phase of the Alq3 has 2,000Å for its saturated thickness and 155℃ for its sublimation temperature. Also, there are no particles generated during plane source sublimation and TPS function as a powerful tool provides optimum thickness information for the AMOLED deposition processes.SID 07 DIGEST • 385 ISSN/007-0966X/07/3801-0385-$1.00 © 2007 SID

12‐4: Blue OLEDs Fabricated by Close‐Space Sublimation

“…This two-stage evaporation behavior has been previously observed in the evaporation of Alq3 film and attributed to a two-layer film structure with different morphological phases. [6] It is likely that what was observed here for BH is due to phase ISSN 0097-996X/19/4801-0153-$1.00 © 2019 SID transition occurring in the film. The evaporation rate drops after first peaking at 149˚C as the film (with a glass transition temperature Tg of 120˚C) has completed the transition from an amorphous phase to a more crystalline phase.…”

37‐2: Plane Source Evaporation Techniques for Super Ultra High Resolution Flexible AMOLED

“…There seems to be an edge effect (organic deposition outside an effective area) lowering of material utilization. [4] If we use large size of substrate such as 1500x950mm in plane source evaporation, the edge effect expects to be decreased and the re-deposited ratio will go higher. The film uniformities appears to be 3~6% at TS=100mm.…”

Belt Plane Source Evaporator for Future AMOLED

“…이유는 Blue 물질의 변성이 커서 소자의 수명이 매우 짧기 때문이다. 향후에는 면 소스 증착기술을 이용하여, 소자의 수명을 늘리기 위한 Blue 인광 유기물질로 구성된 발광층에 대한 연구가 필요하다.벨트 면소스 증착기술AMOLED의 소자제작에 면소스 증착공정을 활용하기 위해서 는 여러 공정 챔버가 필요하다 [12,13]. 경제적인 양산용 면소스 증착챔버의 개발을 위하여, 다수 개의 면소스 증착공정 챔버를 한 개의 공정챔버로 줄이는 방법이 필요한데, 그것이 바로 벨 트면소스 증착기술이다 [14,15].…”