P‐125: Monochromatic Active Matrix Micro‐LED Micro‐displays with >5,000 dpi Pixel Density Fabricated using Monolithic Hybrid Integration Process

Abstract

We report the realization of monochromatic red, green and blue active matrix micro-LED micro-displays with >5,000 dpi pixel density. The micro-displays were fabricated using a wafer-scale monolithic hybrid integration process which shows feasibility and advantages for the mass production. The micro-displays demonstrated are of great potentials in augmented reality applications.

Micro Light‐Emitting Diodes for Display and Flexible Biomedical Applications

“…Therefore, µLED is considered as a candidate to replace OLED and LCD, because of its remarkable environmental stability and high resolution over 1000 pixel per inch (PPI) . It is expected that µLEDs can be used to realize ultrahigh‐resolution displays for next‐generation AR and VR applications, fulfilling consumer requirements for advanced displays …”

52‐1: Invited Paper: Microdisplays for Wearable Augmented Reality — OLED vs LED Based Systems (Invited)

“…A more recent approach [13], [14] proposes to assemble the GaN epi-layers by molecular bonding, before doing the thinning and pixellisation of the GaN epi-layers. For this, both CMOS as well as GaN have to provide a completely planar metal surface.…”

23‐5: Late‐News Paper: High‐Resolution Monolithic Micro‐LED Full‐color Micro‐display

“…1 Depending on the starting epi-wafer, monolithic GaN micro-LED typically features monochromatic emission in blue, violet or green. There have been efforts to develop high-resolution highperformance monochromatic micro-LED micro-displays in both academia 2,3 and industry 4,5 since nearly a decade ago. Nevertheless, full-color emission from the same GaN epilayers is intrinsically challenging due to the extremely underdeveloped efficiency of red GaN LED.…”