1996
DOI: 10.1016/0039-6028(95)95066-4
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Oxidation of hydrogen-passivated silicon surfaces induced by dissociative electron attachment to physisorbed H2O

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Cited by 37 publications
(21 citation statements)
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“…The O1s line for sorbed H 2 O monomer on the Si-H surface is centered at 533 eV, consistent with those observed previously for physisorbed water layers [29]. The O1s line shifts slightly to lower binding energy upon exposure and a distinct shoulder develops at 531 eV [30]. Many researches have suggested O1s peak (529.6 eV) shifts for 0.1 eV as a result of electrostatic interactions [31].…”
Section: Discussionsupporting
confidence: 88%
“…The O1s line for sorbed H 2 O monomer on the Si-H surface is centered at 533 eV, consistent with those observed previously for physisorbed water layers [29]. The O1s line shifts slightly to lower binding energy upon exposure and a distinct shoulder develops at 531 eV [30]. Many researches have suggested O1s peak (529.6 eV) shifts for 0.1 eV as a result of electrostatic interactions [31].…”
Section: Discussionsupporting
confidence: 88%
“…Also plotted is the total DEA cross-section for CF 4 deposited onto multilayer Kr, as inferred from the charge trapping measurements of [39] Table 4 Cross-sections (cm 2 ) for radiation-induced processes in halo-uracils as reported in [58]. Electron cross-sections were obtained with incident electron energies in the approximate range 0-5 eV [55] and [56]. Solid line is drawn to guide the eye havior are not yet known but may derive from inhibited dissociation within close-packed halo-uracil films, solvation of halogen anions within ice, and/or an increased number of low-energy (solvated) electrons within ice.…”
Section: Si 3 -Si -H + Oh → Si 3 -Si -Oh + Hmentioning
confidence: 99%
“…XPS has been used to analyze modifications induced by 0 -20 eV electrons incident on a hydrogen passivated and sputtered Si (111) surface, onto which thin films of H 2 O [55,56] and CF 4 [57] had been physisorbed. In both cases, following the electron-induced dissociation of the molecular adsorbate, a new XPS signal associated with the chemisorption of either H 2 O or F onto the Si surface was observed.…”
Section: Xps Studiesmentioning
confidence: 99%
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“…Possible direct optical processes include destabilization and dissociation of Si-H bonds 9 and excitation of adsorbed OH groups. 10 In order to estimate the effect of thermal desorption, the laser-induced maximum temperature rise has been calculated assuming a Gaussian beam profile and cooling by threedimensional conduction into the substrate. 11 The resulting temperature rise ranges from less than 1 K to almost 400 K for power densities between 2 and 200 kW/cm 2 , respectively.…”
Section: Laser Direct Writing Of Oxide Structures On Hydrogen-passivamentioning
confidence: 99%