“…The deposition process allows pinhole-free growth without inducing internal stress and possesses a high step coverage [ 2 ]. Due to the unique properties of the film, parylene is considered the material of choice for various domains, such as bio-MEMS [ 3 , 4 , 5 , 6 , 7 ], electronic insulation [ 8 , 9 ], energy harvesting [ 10 , 11 , 12 ], flow and temperature sensors [ 13 , 14 , 15 ] or medical device encapsulation [ 2 , 16 , 17 , 18 ]. Furthermore, a parylene film demonstrating excellent thermal stability is highly desirable for high-temperature environment applications, such as aerospace, automotive, battery, or high-power electronic fields.…”