“…In an attempt to rectify the last issue, we carried out a detailed comparison of the performance of two typical metallurgical objectives (1003/ 0.9NA, and 503/0.55NA (long working distance)), an oil immersion objective (1003/1.4NA), and two dry objectives with variable correction collars (603/ 0.9NA and 603/0.7NA). 17 This study considered the signal intensity, the depth scale compression, the depth resolution, and the spectral purity attained for (a) a silicon wafer buried under layers of polymer or glass, (b) polymer laminates buried under glass, and (c) free-standing polymer laminates. Figure 11a shows confocal Raman profiles recorded from a bare silicon wafer (1003 dry objective), and the same wafer buried beneath a~150 lm glass cover slip using each of the objectives listed above.…”