2007
DOI: 10.1366/000370207780220859
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Optimizing Depth Resolution in Confocal Raman Microscopy: A Comparison of Metallurgical, Dry Corrected, and Oil Immersion Objectives

Abstract: Spherical aberration is probably the most important factor limiting the practical performance of a confocal Raman microscope. This paper suggests some simple samples that can be readily fabricated in any laboratory to test the performance of a confocal Raman microscope under realistic operating conditions (i.e., a deeply buried interface, rather than the often-selected alternative of a bare silicon wafer or a thin film in air). The samples chosen were silicon wafers buried beneath transparent polymeric or glas… Show more

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Cited by 70 publications
(75 citation statements)
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“…Therefore, the highest spatial resolution can be achieved with oil immersion objectives with high NA. Also if depth resolution is important, immersion objectives (oil, water) give better results [109]. Generally the axial resolution is around twice the lateral resolution [110].…”
Section: Spatial Resolution and Tip-enhanced Raman Spectroscopy (Ters)mentioning
confidence: 99%
“…Therefore, the highest spatial resolution can be achieved with oil immersion objectives with high NA. Also if depth resolution is important, immersion objectives (oil, water) give better results [109]. Generally the axial resolution is around twice the lateral resolution [110].…”
Section: Spatial Resolution and Tip-enhanced Raman Spectroscopy (Ters)mentioning
confidence: 99%
“…Assuming a truncated Gaussian laser intensity distribution on the microscope objective (I(m) = I o exp(-2m 2 // 2 )), and neglecting diffraction, the intensity along the z-axis is given by Eq. 8: 16,17 IðzÞ=mIðmÞ dm dz…”
Section: Modeling the Confocal Responsementioning
confidence: 99%
“…In an attempt to rectify the last issue, we carried out a detailed comparison of the performance of two typical metallurgical objectives (1003/ 0.9NA, and 503/0.55NA (long working distance)), an oil immersion objective (1003/1.4NA), and two dry objectives with variable correction collars (603/ 0.9NA and 603/0.7NA). 17 This study considered the signal intensity, the depth scale compression, the depth resolution, and the spectral purity attained for (a) a silicon wafer buried under layers of polymer or glass, (b) polymer laminates buried under glass, and (c) free-standing polymer laminates. Figure 11a shows confocal Raman profiles recorded from a bare silicon wafer (1003 dry objective), and the same wafer buried beneath a~150 lm glass cover slip using each of the objectives listed above.…”
Section: Avoiding Spherical Aberration and Depth Scale Compressionmentioning
confidence: 99%
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“…However, to further complicate matters, there can be exceptions, e.g., deeply buried thin samples can appear broadened. 38 So, one should consider the type of sample one is dealing with, and then try to minimize the refractive differences in the light path. For a sample that is aqueous based or emulsion like, the different possible setups using different objectives are shown in Figure 9.…”
Section: Depth Resolutionmentioning
confidence: 99%