Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering

Yoshino, Yukio; Makino, Takahiro; Katayama, Yuzo; Hata, Toshiyuki

doi:10.1016/s0042-207x(00)00313-4

Cited by 130 publications

(60 citation statements)

References 14 publications

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“…Research on zinc oxide (ZnO) thin films has gained much impetus, as this finds applications in optoelectronic and photovoltaic devices likes solar cells [1,2] [as transparent conducting electrodes], light emitting devices [3], surface acoustic wave devices [4], gas sensors [5] and heat mirrors [6] because of their interesting electrical, optical and piezoelectric properties. Thin films of this material have been deposited using various techniques such as sputtering [7], pulsed laser deposition [8], chemical spray pyrolysis (CSP) [9][10][11] molecular beam epitaxy (MBE) [12], etc.…”

Section: Introductionmentioning

confidence: 99%

On tuning the orientation of grains of spray pyrolysed ZnO thin films

Vimalkumar

Poornima

Kartha

et al. 2010

Applied Surface Science

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a b s t r a c tEffect of varying spray rate on the structure and optoelectronic properties of spray pyrolysed ZnO film is analysed. ZnO films were characterised using different techniques such as X-ray diffraction (XRD), photoluminescence, electrical resistivity measurement, and optical absorption. The XRD analysis proved that, with the increase in spray rate, orientation of the grains changed from (1 0 1) plane to (0 0 2) plane. The films exhibited luminescence in two regions-one was the 'near band-edge' (NBE) (∼380 nm) emission and the other one was the 'blue-green emission' (∼503 nm). Intensity of the blue-green emission decreased after orientation of grains shifted to (0 0 2) plane. Scanning electron microscope (SEM) analysis of the films asserts that spray rate has major role in improving the crystallographic properties of the films. Moreover resistivity of the films could be lowered to 2.4 × 10 −2 cm without any doping or post-deposition annealing.

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Section: Introductionmentioning

confidence: 99%

On tuning the orientation of grains of spray pyrolysed ZnO thin films

Vimalkumar

Poornima

Kartha

et al. 2010

Applied Surface Science

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“…The major advantages of magnetron sputtering are that the electron bombardment of the substrate can be greatly reduced and the temperature of substrate can be better controlled by an external heater. 31,32 A 200-Å-thick Cr and a 1500-Å-thick Au layer was deposited by an e-beam evaporator and patterned by lift-off photolithographic method to construct the IDTs. To implement the FPW transducer with 1.5-μm-depth groove RGS, additional photolithograph and silicon etching (by reactive ion etching system) processes must be adopted, as shown in Fig.…”

Section: Fabrication Of the Fpw Devicementioning

confidence: 99%

Improvement of insertion loss and quality factor of flexural plate-wave-based alpha-fetoprotein biosensor using groove-type reflective grating structures

Lin

Huang

Lan

2013

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Conventional flexural plate-wave (FPW) transducers have limited applications in biomedical sensing due to their disadvantages such as high insertion loss and low quality factor. To overcome these shortcomings, we propose a FPW transducer on a low phase velocity insulator membrane (5-μm-thick SiO 2 ) with a novel groove-type reflective grating structure design. Additionally, a cystamine self-assembly monolayer and a glutaraldehyde cross-linking layer are implemented on the backside of the FPW device to immobilize alpha-fetoprotein (AFP) antibody. A FPWbased AFP biosensor with low detection limit (5 ng∕mL) can be achieved and used to measure the extreme low concentration of AFP antigen in human serum for early detection of hepatocellular carcinoma. The proposed FPW-based AFP biosensor also demonstrates a very high quality factor (206), low insertion loss (−40.854 dB), low operating frequency (6.388 MHz), and high sensing linearity (90.7%). © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…Owning to its excellent physical properties, ZnO has been a promising material in piezoelectric and optoelectronic fields [3]. ZnO thin films are widely used to light-emitting diodes (LED) [4], UV sensors [5,6], solar cells [7,8], surface acoustic wave (SAW) devices and optical wave-guide devices as well [9]. It is well known that ZnO thin films can be prepared by variety of techniques such as sputtering [10,11], laser ablation [12][13][14], chemical vapor deposition [15,16] and sol-gel spin-coating technique [17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Effect of Preheating Temperature on Microstructure and Optical Properties of ZnO Thin Films Prepared by Sol-Gel Spin Coating Technique

Wang

Gao

et al. 2016

Acta Phys. Pol. A

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Highly-oriented ZnO thin films prepared by using low-cost technique such as sol-gel technique are of much importance to ZnO-based white light-emitting diodes. The chose of proper preheating temperature in sol-gel technique is still critical for highly-oriented ZnO thin film so far. The mechanisms for the preheating in the formation of ZnO thin film and for the reactions involved in the sol solution have not been clearly stated yet. Thus, in this work, the highly-oriented ZnO thin films were prepared on glass substrates by using sol-gel spincoating technique. The sol solution was prepared by using the two-step method rather than usual one-step method, which facilitates the understanding of the mechanism for the reactions involved in the sol solution. The effect of the preheating temperature on the microstructure and the optical properties of the films were in particular investigated. The mechanisms for the preheating in the formation of the films and for the reactions involved in the sol solution prepared by the two-step method were also proposed in terms of the experimental results. The preheating not only enhances the volatilization of the solvent 2-methoxyethanol and the decomposition of the residual organic species, but also results into the formation of small number of ZnO particles. The preheating temperature of 300• C is most favorable for the highly-oriented ZnO thin film. Increasing the preheating temperature results into the blue shift of the absorption edges of the films. This can be explained by using the quantum-size effect. The photoluminescence spectra of the films show an UV emission at the near-band edge and a broad green-yellow emission at 470-620 nm. The former is closely related to the excitons, while the latter is to the intrinsic defect species in the film.

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Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering

Cited by 130 publications

References 14 publications

On tuning the orientation of grains of spray pyrolysed ZnO thin films

On tuning the orientation of grains of spray pyrolysed ZnO thin films

Improvement of insertion loss and quality factor of flexural plate-wave-based alpha-fetoprotein biosensor using groove-type reflective grating structures

Effect of Preheating Temperature on Microstructure and Optical Properties of ZnO Thin Films Prepared by Sol-Gel Spin Coating Technique

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