Optimization of Shell packaging for cilium MEMS bionic vector hydrophone

Zhang, Guojun; Xu, Qingda; Zhang, Cong; Chen, Shang; Yang, Shi‐e

doi:10.1016/j.sna.2020.111969

Cited by 5 publications

(1 citation statement)

References 16 publications

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“…Two perfectly matched layers are used to match these two hemispheres to eliminate the effect of boundary, creating the ideal situation without unnecessary acoustic reflection. Because silicone oil's acoustic characteristics are similar to that of the human body, the human body is replaced by silicone oil in this model [16,23,24]. The properties of materials are shown in Table II.…”

Section: B Finite Simulationmentioning

confidence: 99%

A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging

et al. 2021

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In this paper, an electronic stethoscope is designed based on a bionic Micro-Electro-Mechanical System (MEMS) sound-sensitive sensor. Inspired by the strong sound reflection effect of the water-air interface, a double-sided diaphragm MEMS electronic stethoscope (DMES) encapsulated by a novel double-sided diaphragm packaging is proposed. The double-sided diaphragm packaging's superiority is verified by comparing a single diaphragm MEMS electronic stethoscope (SMES) with DMES. The frequency of the clinical heart sound signal is mostly in the range of 20-600 Hz. Finite simulation results show that for the same incident sound source, the sound pressure level inside double-sided diaphragm packaging is 4dB higher than that of single diaphragm packaging in this frequency band. Furthermore, the actual auscultation test results show that the signal-to-noise ratio (SNR) of DMES reaches 41.3dB, which is 2.2dB higher than SMES. Besides, comparing the heart sound signals collected by DMES and a commercial electronic stethoscope (Model 3200, 3M Littmann, USA), the high consistency of the two signals' characteristic parameters in the time domain and frequency domain proves the feasibility of DMES. Finally, DMES has the advantages of low cost, and its SNR is 10.2db higher than that of the 3M electronic stethoscope. All these show that DMES has a broad prospect in the popularization of basic medical treatment.

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Section: B Finite Simulationmentioning

confidence: 99%

A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging

et al. 2021

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Recent Progress in MEMS Based Acoustic Vector Sensor for Underwater Applications

Varade¹,

Bhamare²,

Mehta³

et al. 2021

2021 7th International Conference on Electrical, Electronics and Information Engineering (ICEEIE)

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Numerical analysis of effective refractive index ultrasonic sensor based on Cantilever arm structure slot-based dual-micro-ring resonator

Zhao

Zhang

2021

Int. J. Mod. Phys. B

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We propose a novel ultrasonic sensor structure composed of Cantilever arm structure slot dual-micro-ring resonators (DMRR). We present a theoretical analysis of transmission by using the coupled mode theory. The mode field distributions and sound pressure distributions of transmission spectrum are obtained from 3D simulations based on Comsol Multi-physics (COMSOL) method. Our ultrasonic sensor exhibits theoretical sensitivity as high as [Formula: see text], which is 22 times higher than that of the single slot-based micro-ring ultrasonic sensor. Our ultrasonic sensor offers higher sensitivity and a larger detection frequency range than conventional piezoelectric-based ultrasound transducer. The results show that the sensing characteristics of our system can be optimized through changing the position and the angle of sound field. Our ultrasonic sensor is with an area of [Formula: see text], the [Formula: see text]-factor can be approximately [Formula: see text] with radius of [Formula: see text]. We detect an angular range of [Formula: see text] to [Formula: see text] and a minimum distance of [Formula: see text]. Finally, we calculate the Cantilever arm structure slot DMRR array ultrasonic sensor’s optical performance. Our proposed design provides a promising candidate for a hydrophone.

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Optimization of Shell packaging for cilium MEMS bionic vector hydrophone

Cited by 5 publications

References 16 publications

A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging

A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging

Recent Progress in MEMS Based Acoustic Vector Sensor for Underwater Applications

Numerical analysis of effective refractive index ultrasonic sensor based on Cantilever arm structure slot-based dual-micro-ring resonator

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