2021 7th International Conference on Electrical, Electronics and Information Engineering (ICEEIE) 2021
DOI: 10.1109/iceeie52663.2021.9616884
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Recent Progress in MEMS Based Acoustic Vector Sensor for Underwater Applications

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“…Note that these measurements could come from different physical devices. The advent of a new piezoelectric material [22] and progress in Micro-Electro-Mechanical Systems (MEMS) [23] has allowed for the construction of much smaller vector sensors that don't sacrifice sensitivity or bandwidth, further encouraging their use.…”
Section: Acoustic Sensing Schemesmentioning
confidence: 99%
“…Note that these measurements could come from different physical devices. The advent of a new piezoelectric material [22] and progress in Micro-Electro-Mechanical Systems (MEMS) [23] has allowed for the construction of much smaller vector sensors that don't sacrifice sensitivity or bandwidth, further encouraging their use.…”
Section: Acoustic Sensing Schemesmentioning
confidence: 99%