Optimal Materials Selection for Bimaterial Piezoelectric Microactuators

Abstract

Abstract-Piezoelectric actuation is one of the commonly employed actuation schemes in microsystems. This paper focuses on identifying and ranking promising active material/substrate combinations for bimaterial piezoelectric (BPE) microactuators based on their performance. The mechanics of BPE structures following simple beam theory assumptions available in the literature are applied to evolve critical performance metrics which govern the materials selection process. Contours of equal performance are plotted in the domain of the governing piezoelectric material properties (d coefficients, elastic modulus, coupling factors and dielectric constants) for commonly employed substrates to identify optimal material combinations for various functional requirements. The influence of materials selection on the actuation efficiency, quality factor and the electromechanical impedance is also discussed. Selection of a suitable actuation mechanism for a boundary layer flow control application is illustrated by comparing the performance limits of BPE and bimaterial electrothermal actuators considering the constraints on the functional requirements imposed by the associated microfabrication routes.[ 2007-0047]Index Terms-Electromechanical effects, electrothermal effects, microactuators, piezoelectric materials, scaling and materials selection.

Material Selection for Optimal Design of Thermally Actuated Pneumatic and Phase Change Microactuators

“…Fig. 5(b) shows the contours of dimensionless parameters P r , V r , and W r plotted as a function of E and T r for V = 50 and ξ = 50, obtained using (2) and (7). Point O corresponds to the optimal performance for this configuration.…”

“…Hence, identifying and ranking promising candidate materials which deliver the best performance for various actuation schemes are good initiatives for realizing high performance MEMS. Following earlier work on electrothermal [6] and piezoelectric [7] microactuators, this paper primarily assess the influence of engineering materials on the achievable performance limits of two related actuation schemes, namely, thermopneumatic and phase change actuators.…”

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

“…An approach to optimal materials selection for Bi-material Piezoelectric (BPE) actuators has been presented. It is shown that if the potential of active materials could be realized for MEMS applications if better control over the properties of thin films could be achieved during micro fabrication [18]. MEMS milli-actuator for hard-diskdrive tracking servo is exemplified [29].…”

İki Malzemeli Kompozit Bir Kirişin Serbest ve Zorlanmış Titreşimlerinin İncelenmesi

“…Della ve Shu [7] delaminasyonlu iki malzemeli bir kirişin serbest titreşim analizini araştırmışlardır. Srinivasan ve Spearing [8] iki malzemeli piezoelekrik mikro aktüatörlerin optimum malzeme seçimlerine dair çalışmışlardır. Batra vd.…”