2009
DOI: 10.1109/jmems.2009.2013385
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Material Selection for Optimal Design of Thermally Actuated Pneumatic and Phase Change Microactuators

Abstract: This paper discusses a methodology to select materials which deliver the best performance for thermally actuated pneumatic and phase change microactuators. The material selection is based on performance metrics estimated using simple closed form solutions for classical linear elastic theory for axisymmetric plates/membranes and lumped heat capacity thermal models. Although the elastic moduli of the diaphragm materials dictate the volume expansion for a given temperature rise, their influence on the achievable … Show more

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Cited by 8 publications
(4 citation statements)
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“…from Krulevitch et al (1996) (thermopneumatic, bimetallic, and piezoelectric), Gilbertson and Busch (1996) (SMA, electromagnetic, and electrostatic), and Srinivasan and Spearing (2009) (PCM). The maximum value noted for PCM here, is from paraffin wax.…”
Section: Introductionmentioning
confidence: 99%
“…from Krulevitch et al (1996) (thermopneumatic, bimetallic, and piezoelectric), Gilbertson and Busch (1996) (SMA, electromagnetic, and electrostatic), and Srinivasan and Spearing (2009) (PCM). The maximum value noted for PCM here, is from paraffin wax.…”
Section: Introductionmentioning
confidence: 99%
“…These values are still below the limit of thermal alkane PCM systems, which can reach up to 9 J cm –3 . [ 46 ]…”
Section: Resultsmentioning
confidence: 99%
“…The response time strongly depends on the input power for the heating process [26], and on the material choice for the cooling process [27]. At the moment no active cooling is performed.…”
Section: Response Time Analysismentioning
confidence: 99%