Optimal Design of Electromagnetically Actuated MEMS Cantilevers

Barba, Paolo Di; Gotszalk, Teodor; Majstrzyk, Wojciech; Mognaschi, Maria Evelina; Orłowska, Karolina; Wiak, Sławomir; Sierakowski, Andrzej

doi:10.3390/s18082533

Cited by 16 publications

(10 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The performed experiment covered the harmonic actuation of the microcantilever with modulated laser light. In following work, the shape of the microcantilever was optimized in terms of force sensitivity 25 .…”

Section: Methodsmentioning

confidence: 99%

Microcantilever-based current balance for precise measurement of the photon force

Pruchnik

Orłowska

Świadkowski

et al. 2023

Sci Rep

Self Cite

View full text Add to dashboard Cite

We present a method for the quantitative determination of the photon force (PF)—the force generated by the radiation pressure of photons reflected from the surface. We propose an experimental setup integrating innovative microelectromechanical system (MEMS) optimized for the detection of photon force (pfMEMS). An active microcantilever was used as the force detector, while the measurement was conducted in a closed-loop setup with electromagnetic force compensation. In opposition to our previous works, this measurement method provides quantitative not qualitative assessment of PF interaction. Final current-balance setup is suitable for light sources from tens of microwatts to few watts. In our article, we present the results of the performed experiments, in which we measured the PF interactions in the range up to 67.5 pN with resolution of 30 fN in the static measurement.

show abstract

Section: Methodsmentioning

confidence: 99%

Microcantilever-based current balance for precise measurement of the photon force

Pruchnik

Orłowska

Świadkowski

et al. 2023

Sci Rep

Self Cite

View full text Add to dashboard Cite

show abstract

“…As known [15], k 2 ≈ 1 because, physically, p el p and, in addition, T is of the order of 1000 Pa. Then inequality (78) can be written as follows:…”

Section: Condition Of Existence Of At Least One Solution For the Probmentioning

confidence: 99%

“…The scientific community, in the MEMS field, is busy on two main fronts. The first one, theoretically oriented, is devoted to the analysis and synthesis of physical-mathematical models [11] of problems, such as coupled thermal-elastic systems [9,11,12], electrostatic-elastic systems [11,13,14], magnetically actuated systems, and microfluidics [11,[15][16][17][18]; the second front is actively engaged in technology transfer in various application areas, such as the production of MEMS for biomedical applications (miniaturized bio-sensors, tissue engineering, and so on) [14,19]. Clearly, there is no lack of lines of research that combine the theoretical approach with technology transfer [1,11].…”

Section: Introduction To the Problemmentioning

confidence: 99%

Curvature Dependent Electrostatic Field in the Deformable MEMS Device: Stability and Optimal Control

Barba

Fattorusso

Versaci

2020

Communications in Applied and Industrial Mathematics

Self Cite

View full text Add to dashboard Cite

The recovery of the membrane profile of an electrostatic micro-electro-mechanical system (MEMS) device is an important issue because, when applying an external voltage, the membrane deforms with the consequent risk of touching the upper plate of the device (a condition that should be avoided). Then, during the deformation of the membrane, it is useful to know if this movement admits stable equilibrium configurations. In such a context, our present work analyze the behavior of an electrostatic 1D membrane MEMS device when an external electric voltage is applied. In particular, starting from a well-known second-order elliptical semi-linear di erential model, obtained considering the electrostatic field inside the device proportional to the curvature of the membrane, the only possible equilibrium position is obtained, and its stability is analyzed. Moreover, considering that the membrane has an inertia in moving and taking into account that it must not touch the upper plate of the device, the range of possible values of the applied external voltage is obtained, which accounted for these two particular operating conditions. Finally, some calculations about the variation of potential energy have identified optimal control conditions.

show abstract

“…The magnetic microsensors utilizing the commercial 0.35 μm CMOS process has been investigated [110]. In a further contribution, Barba et al [111] designed an electromagnetically actuated MEMS cantilevers proposed in order to minimize parasitic phenomena using Boron-doped silicon. In another seminal work, an electromagnetic and Piezoelectric actuated and piezoresistive sensed CMOS-MEMS device has been modelled for humidity sensing using ZnO NRs (6 μm/chitosan SAMs) as a sensing material [83].…”

Section: Electromagnetic Actuationmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

View full text Add to dashboard Cite

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

show abstract

Optimal Design of Electromagnetically Actuated MEMS Cantilevers

Cited by 16 publications

References 28 publications

Microcantilever-based current balance for precise measurement of the photon force

Microcantilever-based current balance for precise measurement of the photon force

Curvature Dependent Electrostatic Field in the Deformable MEMS Device: Stability and Optimal Control

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Contact Info

Product

Resources

About