Optical sensitivity enhancement in grating based micromechanical accelerometer by reducing non-parallelism error

Gao, Shan; Xiong, Heng; Feng, Lishuang

doi:10.1364/oe.27.006565

Cited by 9 publications

(3 citation statements)

References 30 publications

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Section: Classifications Of Optical Interferometric Mems Accelerometermentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Section: Classifications Of Optical Interferometric Mems Accelerometermentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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“…Although it is of relatively low sensitivity and is vulnerable to environmental influences, its advantages of the simplicity, low cost and multi-point measurement ability lead research-ers' efforts in the development of this type of MOEMS accelerometer. 34 , (c) ref. 39 and (f) ref.…”

Section: Fiber Bragg Grating Schemementioning

confidence: 99%

Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

Wang

et al. 2021

OEA

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Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent years, with the in-depth research and development of MOEMS accelerometers, the community is flourishing with the possible applications in seismic monitoring, inertial navigation, aerospace and other industrial and military fields. There have been a variety of schemes of MOEMS accelerometers, whereas the performances differ greatly due to different measurement principles and corresponding application requirements. This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers. According to the optical measurement principle, we divide the MOEMS accelerometers into three categories: the geometric optics based, the wave optics based, and the new optomechanical accelerometers. Regarding the most widely studied category, the wave optics based accelerometers are further divided into four sub-categories, which is based on grating interferometric cavity, Fiber Bragg Grating (FBG), Fabry-Perot cavity, and photonic crystal, respectively. Following a brief introduction to the measurement principles, the typical performances, advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations. This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.

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“…Among these techniques, optical approaches have been demonstrated to be of higher precision and stability without suffering from electro-magnetic interference (EMI) at the same time 5,6 .Benefitting from high precision for displacement measurement, grating interferometric structure and Fabry-Perot structure have been demonstrated as effective approaches to high-performance MEMS accelerometers [7][8][9][10] . Generally, a cavity structure consisting of two layers or end faces is necessary for effective optical interference, which typically requires a quite amount of space and relatively precise assembly 11,12 . Recently, efforts have been made to apply photonic crystal structure to accelerometers.…”

mentioning

confidence: 99%

Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides

Xin

Zhang

Wang

et al. 2022

Sci Rep

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In this paper, a novel optical MEMS accelerometer is proposed based on evanescent coupling between parallel silicon nanowaveguides. The coupling length between nanowaveguides changes due to the input acceleration, leading to a great change of coupling efficiency. As a result, the applied acceleration can be obtained by measuring the transmission of waveguiding light. Simulation results with optical displacement sensing sensitivity of 32.83%/$$\upmu $$ μ m within measurement range of 1.68 g is obtained. This design shows high compactness with no need of assembly, suggesting great potential in applications such as integrated photonic circuits.

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Optical sensitivity enhancement in grating based micromechanical accelerometer by reducing non-parallelism error

Cited by 9 publications

References 30 publications

Optical Interferometric MEMS Accelerometers

Optical Interferometric MEMS Accelerometers

Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides

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