Review of micromachined optical accelerometers: from m&lt;i&gt;g&lt;/i&gt; to sub-μ&lt;i&gt;g&lt;/i&gt;

Lu, Qiuyu; Wang, Yinan; Wang, Xiaoxu; Yao, Yuan; Wang, Xuewen; Huang, Wei

doi:10.29026/oea.2021.200045

Cited by 47 publications

(17 citation statements)

References 166 publications

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“…As an important application of such miniaturized devices, the development of different photonic waveguides leads to a new generation of labon-a-chip sensing applications 9 as well as novel miniaturized devices 6 . Such new developments hold a relation with the so-called micro-opto-electro-mechanical systems (MOEMS), derived from the well-known microelectro-mechanical systems (MEMS) with the addition of optical components 10 .…”

Section: Introductionmentioning

confidence: 99%

Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development

Leal‐Junior¹,

Avellar²,

Biazi³

et al. 2022

OEA

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This paper presents the development of a bioinspired multifunctional flexible optical sensor (BioMFOS) as an ultrasensitive tool for force (intensity and location) and orientation sensing. The sensor structure is bioinspired in orb webs, which are multifunctional devices for prey capturing and vibration transmission. The multifunctional feature of the structure is achieved by using transparent resins that present both mechanical and optical properties for structural integrity and strain/deflection transmission as well as the optical signal transmission properties with core/cladding configuration of a waveguide. In this case, photocurable and polydimethylsiloxane (PDMS) resins are used for the core and cladding, respectively. The optical transmission, tensile tests, and dynamic mechanical analysis are performed in the resins and show the possibility of light transmission at the visible wavelength range in conjunction with high flexibility and a dynamic range up to 150 Hz, suitable for wearable applications. The BioMFOS has small dimensions (around 2 cm) and lightweight (0.8 g), making it suitable for wearable application and clothing integration. Characterization tests are performed in the structure by means of applying forces at different locations of the structure. The results show an ultra-high sensitivity and resolution, where forces in the μN range can be detected and the location of the applied force can also be detected with a sub-millimeter spatial resolution. Then, the BioMFOS is tested on the orientation detection in 3D plane, where a correlation coefficient higher than 0.9 is obtained when compared with a gold-standard inertial measurement unit (IMU). Furthermore, the device also shows its capabilities on the movement analysis and classification in two protocols: finger position detection (with the BioMFOS positioned on the top of the hand) and trunk orientation assessment (with the sensor integrated on the clothing). In both cases, the sensor is able of classifying the movement, especially when analyzed in conjunction with preprocessing and clustering techniques. As another wearable application, the respiratory rate is successfully estimated with the BioMFOS integrated into the clothing. Thus, the proposed multifunctional device opens new avenues for novel bioinspired photonic devices and can be used in many applications of biomedical, biomechanics, and micro/nanotechnology.

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Section: Introductionmentioning

confidence: 99%

Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development

Leal‐Junior¹,

Avellar²,

Biazi³

et al. 2022

OEA

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“…Micro-opto-electromechanical systems (MOEMSs) are a new class of micro-systems that integrate micro-optical devices and micro-electromechanical systems (MEMSs); thus, they can simultaneously realize mechanical, electrical, and optical functions [1,2]. With the characteristics of high integration, miniaturizability and accurate control, MOEMSs have great potential applications in optical communication, micro sensing and optical imaging, among others [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Wang

Zheng

et al. 2022

Micromachines

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Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems.

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“…The squeeze film air damping effect occurs when a plate is pushed towards a rigid surface with a fluid film in between. Squeeze film air damping has a strong influence on the dynamic behavior of non-vacuum microelectromechanical devices, such as the quality factor of micro-resonators [ 1 , 2 ], contacting time of micro-switchs [ 3 ], bandwidth of MEMS accelerometers [ 4 , 5 ], and frequency response of electric bearings [ 6 , 7 ]. An extensive study of the models for squeeze film air damping has been performed in past years, both analytically and numerically [ 8 , 9 , 10 , 11 ], which are mainly based on the Reynolds equation.…”

Section: Introductionmentioning

confidence: 99%

Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios

Fang

Bai

et al. 2022

Sensors

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Squeeze film air damping is a significant factor in the design of MEMS devices owing to its great impact on the dynamic performance of vibrating structures. However, the traditional theoretical results of squeeze film air damping are derived from the Reynolds equation, wherein there exists a deviation from the true results, especially in low aspect ratios. While expensive efforts have been undertaken to prove that this deviation is caused by the neglect of pressure change across the film, a quantitative study has remained elusive. This paper focuses on the investigation of the finite size effect of squeeze film air damping and conducts numerical research using a set of simulations. A modified expression is extended to lower aspect ratio conditions from the original model of squeeze film air damping. The new quick-calculating formulas based on the simulation results reproduce the squeeze film air damping with a finite size effect accurately with a maximum error of less than 1% in the model without a border effect and 10.185% in the compact model with a border effect. The high consistency between the new formulas and simulation results shows that the finite size effect was adequately considered, which offers a previously unattainable precise damping design guide for MEMS devices.

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Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

Cited by 47 publications

References 166 publications

Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development

Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios

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