Properties of GaN epilayers grown by laser-assisted chemical vapour deposition are discussed. Good crystallinity and surface morphology of the films is demonstrated. Micro-Raman spectra are explained by scattering by small, randomly oriented cubic phase units present in the GaN film.PACS numbers: 68.55. 81.15.Gh, 61.16.Ch, Laser-assisted chemical vapour deposition (LCVD) has become an attractive technology in the electronic industry over the past decade. One of the key benefits of LCVD is that instead of using the thermal energy, LCVD takes advantage of photon energy to induce chemical reactions between reactants and deposit fllms. In this work we are using the photolytic process in which the ArF 193 nm excimer laser beam is absorbed by the precursor gases. The deposition of GaN was carried out at temperatures around 600°C. Low growth temperatures, between 470°C and 680°C, make possible the use of a range of thermally unstable substrates, such as silicon, gallium arsenide, quartz glass, in addition to sapphire and SiC.GaN films grown by LCVD with a range of ammonia flow rates show a systematic variation in electrical parameters. The Hall mobility increases proportionally with flow rate, from 55 cm 2 /(V s) to 90 cm 2 /(V s), saturating at 95 cm 2 /(V s) at flow rates above about 100 ml/min. The electron carrier concentration decreases monotonically and reproducibly from 10 17 cm -3 to 6 x 10 14 cm-3 over the flow rate range 0 to 100 ml/min. The sharp increase in the Hall mobility indicates that the electron scattering inside the film has been reduced. Nitrogen vacancies are therefore assumed to be reduced, as growth conditions are not changed other than by the addition of excess nitrogen via the ammonia plasma. Electron concentration continues to fall beyond mobility saturation, suggesting that the reduction in nitrogen vacancy concentration thought to be re8ponsible for large n-type autodoping, is accompanied by compensation, possibly by increasing the density of other defects caused by ion damage.(331)