2016
DOI: 10.1364/ol.41.004629
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Optical fiber vector flow sensor based on a silicon Fabry–Perot interferometer array

Abstract: We report a miniature fiber-optic water vector flow sensor based on an array of silicon Fabry-Perot interferometers (FPIs). The flow sensor is composed of four silicon FPIs, one in the center with the other three equally distributed around it. The center FPI is heated by a cw laser at 980 nm, which is guided through the lead-in single mode fiber. The temperature structure established within the sensor head due to laser heating is a function of the flow vector (speed and direction), which can be deduced from th… Show more

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Cited by 37 publications
(24 citation statements)
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“…(C) Fourier transforms. (D) Wavelength division multiplexing of a silicon F‐P interferometer array for vector flow detection 77 . (E) Time division and wavelength division multiplexing of F‐P acoustic sensors 29 .…”
Section: Multiplexing Mechanismsmentioning
confidence: 99%
See 1 more Smart Citation
“…(C) Fourier transforms. (D) Wavelength division multiplexing of a silicon F‐P interferometer array for vector flow detection 77 . (E) Time division and wavelength division multiplexing of F‐P acoustic sensors 29 .…”
Section: Multiplexing Mechanismsmentioning
confidence: 99%
“…Different from the multiplexing of FBG sensors, the WDM of F‐P sensors is realized by coarse wavelength division multiplexer/demultiplexer (CWDM) or dense wavelength division multiplexer/demultiplexer (DWDM). As shown in Figure 5(D), Liu et al proposed a four sensor array fiber‐optic vector flow sensor 77 . Sensors 1–4 are connected to the 1530, 1550, 1570, and 1590 nm channels of CWDM, respectively.…”
Section: Multiplexing Mechanismsmentioning
confidence: 99%
“…Optical thermal flow sensors utilize primarily optically heated fiber tips [5,6] or fiber sections [7,8], which also incorporate optical temperature sensors [5][6][7][8]. Many different fiber-optic flow sensor designs have been proposed in recent years, and they are based mainly on spectrally resolved fiber-optic sensors, such as Fiber Bragg gratings (FBG) [7][8][9][10][11][12] or Fabry-Perot interferometers (FPI) [5,6,[13][14][15]. Flow sensors that utilize FBGs usually comprise the FBG inscribed into a special optical fiber that contains light-absorbing material at, or in the vicinity of, the grating, and allows for optical induced heating of the sensing (FBG) area.…”
Section: Introductionmentioning
confidence: 99%
“…Detecting direction requires two or more independent temperature sensors in the vicinity of a heat source. In an optical fiber this can be achieved using multicore fibers [8], but more common are the realization of heaters and nearby thermometers in micro-electro-mechanical-systems (MEMS) [9,10,11]. Their fabrication remains costly and complex, and assembly procedures to integrate these sensors within a fluidic conduit is challenging [12].…”
Section: Introductionmentioning
confidence: 99%