Optical emission of magnetron discharges as a function of the composition of argon—nitrogen gas mixtures

Study on the influence of nitrogen on titanium nitride in a dc post magnetron sputtering plasma system

“…In magnetron discharges with argon (Ar) and nitrogen (N 2 ) gas mixture, atomic N 2 species play a significant role in the surface nitriding processes [27,28]. The presence of ionic, atomic and molecular N 2 as well as ionic and atomic Ar and also that of the cathode species can be detected with the help of optical emission spectroscopy (OES) [29]. The numerous spectral lines, which are emitted by the different species, are the result of various collisional mechanisms.…”

On the role of plasma-surface interactions in dc magnetron discharges in Ar-N2gas mixtures

“…In the case of discharges in argon-nitrogen gas mixtures, it is argued that atomic nitrogen species play a role in the surface nitriding processes [2]. The presence of atomic nitrogen and other atomic and molecular species is observed experimentally in the discharge [3] and have been theoretically calculated [4]. Calculation of the mechanisms involved in the plasma chemistry requires the introduction of all the available species.…”

Reactive process and hysteresis effect in magnetron with magnetized hollow cathode enhanced target

“…The decrease of emission from Ar appears at lower N 2 content than in magnetron, its onset is also shifted to the left. In the study on optical emission from magnetron discharges as a function of a composition of argon‐nitrogen mixtures, [ 10 ] the authors analysed how the signals from N 2 and N 2 + and signal from Ar evolve mutually. With increasing emissions from N 2 and N 2 + , the Ar signal continuously decreases.…”