“…Relatively opaque materials such as gold and nickel support robust, binary patterns, with EUV and soft X-ray wavelength-scale feature sizes and high-aspect ratios (i.e., thick with narrow grooves) when required. The Nanowriter electron-beam lithography tool at LBNL's Center for X-ray Optics has specialized control hardware for generating curved shapes at high resolutions [29]. These optics can be created on thin membranes, such as silicon-nitride, or as free-standing, stencil-type patterns for higher efficiency.…”