Metrology for the Advancement of X-ray Optics at the ALS

Goldberg, Kenneth A.; Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Celestre, Richard; Chao, Weilun; Gullikson, Eric M.; Lacey, Ian; McKinney, Wayne R.; Merthe, Daniel J.; Padmore, H. A.

doi:10.1080/08940886.2013.832583

Cited by 7 publications

(6 citation statements)

References 27 publications

(29 reference statements)

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“…With these instruments, the XROL delivers the state-of-the-art optical metrology required to build and maintain high performance operations of the ALS beamlines. 15 For example, the upgraded LTP-II and DLTP are capable of one-dimensional surface slope profiling with the proven accuracy of tangential slope measurements with flat optics of ~60 nrad (rms) and accuracy with significantly curved optics (radius of curvature of ≥15 m) of ~200 nrad limited by the profiler's systematic errors.…”

Section: And References Therein)mentioning

confidence: 99%

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Lacey

Adam

Centers

et al. 2017

Advances in Metrology for X-Ray and EUV Optics VII

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The research and development work on the Advanced Light Source (ALS) upgrade to a diffraction limited storage ring light source, ALS-U, has brought to focus the need for near-perfect x-ray optics, capable of delivering light to experiments without significant degradation of brightness and coherence. The desired surface quality is characterized with residual (after subtraction of an ideal shape) surface slope and height errors of <50−100 nrad (rms) and <1−2 nm (rms), respectively. The ex-situ metrology that supports the optimal usage of the optics at the beamlines has to offer even higher measurement accuracy. At the ALS X-Ray Optics Laboratory, we are developing a new surface slope profiler, the Optical Surface Measuring System (OSMS), capable of two-dimensional (2D) surface-slope metrology at an absolute accuracy below the above optical specification. In this article we provide the results of comprehensive characterization of the key elements of the OSMS, a NOM-like high-precision granite gantry system with air-bearing translation and a custom-made precision air-bearing stage for tilting and flipping the surface under test. We show that the high performance of the gantry system allows implementing an original scanning mode for 2D mapping. We demonstrate the efficiency of the developed 2D mapping via comparison with 1D slope measurements performed with the same hyperbolic test mirror using the ALS developmental long trace profiler. The details of the OSMS design and the developed measuring techniques are also provided.

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Section: And References Therein)mentioning

confidence: 99%

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Lacey

Adam

Centers

et al. 2017

Advances in Metrology for X-Ray and EUV Optics VII

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“…The challenge to steer diffractionlimited and coherence-preserved X-ray beams from the source towards the experiment defines extraordinary high-quality requirements on the production of the X-ray optics. In particular, the figure errors of the mirrors have to be below ISSN 1600-5775 100 nrad root-mean-square which is close to the current limit of state-of-the-art visible-light metrology with interferometers or profilometers (Goldberg et al, 2013;Idir et al, 2013;Siewert et al, 2014;Yashchuk et al, 2015) and close to the limits of the currently available optics manufacturing technology (Thiess et al, 2010;Yamada et al, 2015;Stö rmer et al, 2016).…”

Section: Introductionmentioning

confidence: 52%

X-ray grating interferometer for in situ and at-wavelength wavefront metrology

Kayser

Dávid

Flechsig

et al. 2017

J Synchrotron Radiat

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Edited by M. Yabashi, RIKEN SPring-8 Center, JapanKeywords: X-ray grating interferometry; wavefront metrology; X-ray optics; XFELs.X-ray grating interferometer for in situ and at-wavelength wavefront metrology Yves Kayser,* Christian David, Uwe Flechsig, Juraj Krempasky, Volker Schlott and Rafael Abela Paul Scherrer Institut, 5232 Villigen PSI, Switzerland. *Correspondence e-mail: yves.kayser@psi.ch A wavefront metrology setup based on the X-ray grating interferometry technique for spatially resolved, quantitative, in situ and at-wavelength measurements of the wavefront at synchrotron radiation and hard X-ray freeelectron laser beamlines is reported. Indeed, the ever-increasing demands on the optical components to preserve the wavefront shape and the coherence of the delivered X-ray beam call for more and more sensitive diagnostic instruments. Thanks to its angular sensitivity, X-ray grating interferometry has been established in recent years as an adequate wavefront-sensing technique for quantitatively assessing the quality of the X-ray wavefront under working conditions and hence for the in situ investigation of X-ray optical elements. In order to characterize the optical elements at any given beamline by measuring the aberrations introduced in the wavefront, a transportable X-ray grating interferometry setup was realised at the Swiss Light Source (SLS). The instrument, which is expected to be a valuable tool for investigating the quality of the X-ray beam delivered at an endstation, will be described hereafter in terms of the hardware setup and the related data analysis procedure. Several exemplary experiments performed at the X05DA Optics beamline of the SLS will be presented.

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“…13,14 With these instruments, the XROL delivers the state-of-the-art surface slope metrology required to build and maintain high performance operations of the ALS beamlines. 15 For example, the upgraded LTP-II and DLTP are capable of one-dimensional surface slope profiling with the proven accuracy of tangential slope measurements with flat optics of ~60 nrad (rms) and accuracy with significantly curved optics (radius of curvature of 15-20 m) of ~200 nrad limited by the profiler's systematic errors.…”

Section: Introductionmentioning

confidence: 99%

The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Lacey

Anderson

Centers

et al. 2018

Advances in X-Ray/Euv Optics and Components XIII

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To preserve the brightness and coherence of x-rays produced by diffraction-limited-storage-ring (DLSR) and freeelectron-laser (FEL) light sources, beamline optics must have unprecedented quality. For example, in the case of the most advanced beamlines for the DLSR source under development at the Advanced Light Source (ALS), the ALS-U, we need highly curved x-ray mirrors with surface slope tolerances better than 50-100 nrad (root-mean-square, rms). At the ALS X-Ray Optics Lab (XROL), we are working on the development of a new Optical Surface Measuring System (OSMS) with the required measurement accuracy. The OSMS is capable for the two-dimensional (2D) surface slope metrology over the spatial range from the sub-mm scale to the clear aperture. Usage of different arrangements of the OSMS sensors allows measuring the mirrors in the face-up or side-facing orientation, corresponding to the beamline application. The OSMS translation system and data acquisition software are designed to support multi scan measurement runs optimized for automatic suppression and compensation of instrumental drifts and major angular and spatial systematic errors. Here, we discuss the recent results of the OSMS research and development project. We provide details of the OSMS design and describe results of experimental performance tests of the gantry system. In particular, we show that the system is capable for measurement repeatability with strongly curved mirrors on the level of 20 nrad (rms). The high angular resolution of the OSMS rotational tip-tilt stage is adequate for implementation of instrumental calibration with using the mirror under test as a reference. The achieved measuring accuracy is demonstrated via comparison to metrology with the carefully calibrated Developmental Long Trace Profiler, also available at the XROL.

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Metrology for the Advancement of X-ray Optics at the ALS

Cited by 7 publications

References 27 publications

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

X-ray grating interferometer for in situ and at-wavelength wavefront metrology

The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

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