The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Lacey, Ian; Anderson, K.M.; Centers, Gary P.; Geckeler, Ralf D.; Gevorkyan, Gevork S.; Grossiord, John; Just, A.; Nicolot, Theo; Smith, Brian V.; Yashchuk, Valeriy V.

doi:10.1117/12.2321347

Cited by 15 publications

(32 citation statements)

References 53 publications

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“…Much effort has also been made on these slope‐based profilers to achieve sub‐50 nrad accuracy including the nano‐accuracy surface profiler (NSP) at the Brookhaven National Laboratory [ 214 ] and the optical surface measuring system (OSMS) at the Advanced Light Source X‐ray Optics Lab. [ 216 ] Readers are referred to refs. [213,214] for a detailed review as well as an evolution map of LTPs and NOMs.…”

Section: Single‐point‐probe‐based Profilometrymentioning

confidence: 99%

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Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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Freeform optical surfaces are advantageous to optical designers, as they provide additional degrees of freedom for optimization. The loss of rotational symmetry, however, makes measurement of freeforms more challenging. Herein, advances in interferometric areal measurement of freeform optical surfaces, including null tests, non-null tests, near-null tests, and adaptive null tests, are reviewed. Some new developments, in the Hartmann test, deflectometry, and phase retrieval, as representatives of non-interferometric areal measurement, are then presented. Overall, the focus is on single-point-probe-based profilometry categorized into coordinate measurements and slope-or curvature-based measurements. Innovative measurement technology is trying to bridge the gap between high accuracy and high dynamic range as freeform optical surfaces are finding more applications in visible and shorter-wavelength optics.

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Section: Single‐point‐probe‐based Profilometrymentioning

confidence: 99%

“…[ 223 ] The measurement accuracy is still to be verified for strongly curved surfaces. [ 216 ] Recently a new nanoprofiler capable of 3D surface error measurement to nanometer accuracy was developed at Osaka University based on the normal vector tracing method. [ 224 ]…”

Section: Single‐point‐probe‐based Profilometrymentioning

confidence: 99%

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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“…The developed approaches are rather universal and, therefore, widely applicable. Figure 1 shows the XROL OSMS experimental set-up [49,50] based on the multifunctional translation system, including 2D gantry and a custom tilt-flip-Z-translation stage (TFZS) and four electronic autocollimators ELCOMAT-3000 [53]. The AC in the surface-under-test (SUT) measuring (sample) channel, AC˗1, is placed vertically on the OSMS X-axis translation carriage.…”

Section: Introductionmentioning

confidence: 99%

“…The air convection noise problem, transferred now to the reference channel, is overcome by appropriately filtering the reference data as discussed in detail in Ref. [50]. [49,50] based on the multifunctional translation system, including 2D gantry and custom tilt-flip-Z-translation stage (TFZS), and four electronic autocollimators ELCOMAT-3000 [53], with a fixed distance AC-1 in the sample arm [38].…”

Section: Introductionmentioning

confidence: 99%

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Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors

Lacey

Anderson

Dickert

et al. 2019

Advances in Metrology for X-Ray and EUV Optics VIII

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X-ray optics, desired for beamlines at free-electron-laser and diffraction-limited-storage-ring x-ray light sources, must have almost perfect surfaces, capable of delivering light to experiments without significant degradation of brightness and coherence. To accurately characterize such optics at an optical metrology lab, two basic types of surface slope profilometers are used: the long trace profilers (LTPs) and nanometer optical measuring (NOM) like angular deflectometers, based on electronic autocollimator (AC) ELCOMAT-3000. The inherent systematic errors of the instrument's optical sensors set the principle limit to their measuring performance. Where autocollimator of a NOM-like profiler may be calibrated at a unique dedicated facility, this is for a particular configuration of distance, aperture size, and angular range that does not always match the exact use in a scanning measurement with the profiler. Here we discuss the developed methodology, experimental setup , and numerical methods of transferring the calibration of one reference AC to the scanning AC of the Optical Surface Measuring System (OSMS), recently brought to operation at the ALS X˗Ray Optics Laboratory. We show that precision calibration of the OSMS performed in three steps, allows us to provide high confidence and accuracy low-spatial-frequency metrology and not 'print into' measurements the inherent systematic error of tool in use. With the examples of the OSMS measurements with a state-of-the-art x-ray aspherical mirror, available from one of the most advanced vendors of x˗ray optics, we demonstrate the high efficacy of the developed calibration procedure. The results of our work are important for obtaining high reliability data, needed for sophisticated numerical simulations of beamline performance and optimization of beamline usage of the optics.

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Environmental influences on autocollimator-based angle and form metrology

Geckeler

Křen

Just

et al. 2019

Review of Scientific Instruments

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Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement. In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy metrology with autocollimators in profilometers. They can cause substantial systematic errors in form measurement, especially in the case of large and strongly curved optical surfaces of high dynamic range. Relative angle and form measuring errors of the order of 10 −4 are to be expected. We characterize environmental influences by extended theoretical and experimental investigations and derive strategies for correcting them. We also discuss the possibility to minimize the contributions of some errors by the application of sophisticated experimental arrangements and methods. This work aims at approaching fundamental limits in autocollimator-based slope and form metrology.

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The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Cited by 15 publications

References 53 publications

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors

Environmental influences on autocollimator-based angle and form metrology

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