2012
DOI: 10.1002/cphc.201101020
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On the Mechanisms of Ni‐Catalysed Graphene Chemical Vapour Deposition

Abstract: How does your graphene grow? In situ X-ray photoelectron spectroscopy and X-ray diffraction measurements during chemical vapor deposition on Ni catalyst films show that graphene forms both isothermally and by precipitation on cooling (see picture). A coherent graphene growth model is devised and sub-surface dissolved carbon is shown to play an important role

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Cited by 96 publications
(173 citation statements)
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“…In the presence of nickel oxide (NiO), hydroxide (Ni(OH) 2 ) and oxyhydroxide (γ-NiOOH), clear XPS lines should appear at 854.7 eV, 855.3 eV and 855.8 eV respectively [23,24,25], and the energy difference between the Ni 2p 3/2 peak and the bulk plasmon satellite should be reduced to 5.8 eV, in the presence of NiO, and to 5.3 eV, in the presence of Ni(OH) 2 . On the other hand, in case of carbon contamination of the Ni substrate during CVD growth, a peak corresponding to the Ni-C binding energy should appear at 853 eV [26]. Our XPS spectra reveal none of these [see Fig.…”
mentioning
confidence: 77%
“…In the presence of nickel oxide (NiO), hydroxide (Ni(OH) 2 ) and oxyhydroxide (γ-NiOOH), clear XPS lines should appear at 854.7 eV, 855.3 eV and 855.8 eV respectively [23,24,25], and the energy difference between the Ni 2p 3/2 peak and the bulk plasmon satellite should be reduced to 5.8 eV, in the presence of NiO, and to 5.3 eV, in the presence of Ni(OH) 2 . On the other hand, in case of carbon contamination of the Ni substrate during CVD growth, a peak corresponding to the Ni-C binding energy should appear at 853 eV [26]. Our XPS spectra reveal none of these [see Fig.…”
mentioning
confidence: 77%
“…We attribute this self-terminating growth to the grown layers blocking the precursor supply to the Ni catalyst. 5 The spin probe analyzer electrode geometry was defined in a second ebeam step. A 1 µm x 1 µm window was opened in UVIII resist on top of the GPFE.…”
Section: Methodsmentioning
confidence: 99%
“…The parameter space of these processes has only recently been investigated by in situ x-ray photoelectron spectroscopy (XPS) measurements during CVD growth, allowing careful understanding of the mechanisms at play [18,49]. Usually, growth is enabled at temperatures >600 °C, but a fine tuning of the processes allowed the growth to be limited to a monolayer and the temperature to be lowered down to 450 °C and below (thus compatible with the usual CMOS processing) [18,50]. This highlights the effort required to achieve high-quality FM/ graphene interfaces.…”
Section: Direct Integration Of Graphene In Mtj By Cvdmentioning
confidence: 99%