On the heating mode transition in high-frequency inductively coupled argon discharge

Seo, Sang‐Hun; Hong, Jung-In; Bai, KH; Chang, Hong‐Young

doi:10.1063/1.873206

Cited by 62 publications

(29 citation statements)

References 17 publications

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“…But this is usually associated with a decrease of kT e . However, Seo et al reported that during transition from CC to IC mode an intermediate state is reached with high plasma potential and enhanced N e and kT e , as compared to the pristine CC regime [31]. This is similar to the present observations and supports the idea that in the high pressure part of region ① the discharge still operates in CC regime.…”

Section: Tablesupporting

confidence: 94%

Low flux and low energy helium ion implantation into tungsten using a dedicated plasma source

Pentecoste

Thomann

Melhem

et al. 2016

Nuclear Instruments and Methods in Physics Research Section B:

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a b s t r a c tThe aim of this work is to investigate the first stages of defect formation in tungsten (W) due to the accumulation of helium (He) atoms inside the crystal lattice. To reach the required implantation conditions, i.e. low He ion fluxes (10 11 -10 14 ions.cm 2 .s À1 ) and kinetic energies below the W atom displacement threshold (about 500 eV for He + ), an ICP source has been designed and connected to a diffusion chamber. Implantation conditions have been characterized by means of complementary diagnostics modified for measurements in this very low density helium plasma. It was shown that lowest ion fluxes could only be reached for the discharge working in capacitive mode either in a or c regime. Special attention was paid to control the energy gained by the ions by acceleration through the sheath at the direct current biased substrate. At very low helium pressure, in a regime, a broad ion energy distribution function was evidenced, whereas a peak centered on the potential difference between the plasma and the biased substrate was found at higher pressures in the c mode. Polycrystalline tungsten samples were exposed to the helium plasma in both regimes of the discharge and characterized by positron annihilation spectroscopy in order to detect the formed vacancy defects. It was found that W vacancies are able to be formed just by helium accumulation and that the same final implanted state is reached, whatever the operating mode of the capacitive discharge.

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Section: Tablesupporting

confidence: 94%

Low flux and low energy helium ion implantation into tungsten using a dedicated plasma source

Pentecoste

Thomann

Melhem

et al. 2016

Nuclear Instruments and Methods in Physics Research Section B:

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show abstract

“…The argon operating pressure ranged from 27 mTorr to 600 mTorr. In the ICP source [13], a flat coil antenna 20 mm in diameter was positioned on a quartz window 30 cm in diameter and 2 cm in thickness. The antenna was powered through an impedance matching network from 200 W to 800 W at 13.56 MHz using an rf generator (ENI, A1000-1971).…”

Section: Methodsmentioning

confidence: 99%

Parametric study on excitation temperature and electron temperature in low pressure plasmas

Park

Choe

2010

Current Applied Physics

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“…[1][2][3] Furthermore, two operational modes, called the E and H modes, and the E-H heating mode transition make ICPs more attractive because of their discharge characteristics and the physics involved.…”

Section: Introductionmentioning

confidence: 99%

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

Lee

Chung

2010

Physics of Plasmas

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Electron energy distribution function ͑EEDF͒ measurements were conducted in nitrogen gas inductively coupled plasma ͑ICP͒. At a low ICP power ͑capacitive mode͒ and a high gas pressure, the measured EEDF had an unusual distribution with a hole near this electron energy of 3 eV. This distribution is primarily due to vibrational excitation collisions because the vibrational cross section has a sharp peak at the electron energy in nitrogen gas. However, the EEDF evolved into a Maxwellian distribution and the hole disappeared, when the discharge mode transition from E mode to H mode occurred. This evolution of the EEPF can be understood by the electron-electron collision effect, and it occurs when the electron-electron collision time become shorter than the electron residence time.

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On the heating mode transition in high-frequency inductively coupled argon discharge

Cited by 62 publications

References 17 publications

Low flux and low energy helium ion implantation into tungsten using a dedicated plasma source

Low flux and low energy helium ion implantation into tungsten using a dedicated plasma source

Parametric study on excitation temperature and electron temperature in low pressure plasmas

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

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