“…Quantum size silicide crystals formed on the sili con surface attract considerable attention, first, due to the unceasing tendency to the reduction of the size of microelectronics elements and, second, unique prop erties of silicides-silicon structures, which makes it possible to obtain fast responding elements of elec tronic devices [1][2][3]. Manufacturing of nanomaterials with unique physical, electrochemical, electric, opti cal, catalytic, and other properties is one of priority trends in the development of science and technology, which opens wide prospects for designing new effec tive functional devices and sensor systems.…”